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This Solicitation opportunity from Government of Canada was posted on May 14, 2026. The submission period has ended. Browse the details below for market research, or find similar active opportunities.

Supply and Install of a Plasma Enhanced Chemical Vapor Deposition

Closed
UWORFPSR-1918Canada

Contract Overview

Solicitation details, issuing organization, response deadlines, documents, and interested companies for this government contract opportunity.

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AI Contract Overview

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The University of Western Ontario is seeking proposals for the supply and installation of a Plasma Enhanced Chemical Vapor Deposition (PECVD) system to be located in its Nanofabrication Facility. The system must be capable of depositing silicon oxide, silicon nitride, and amorphous silicon on silicon wafers, including both single-layer and multi-layer structures of predetermined thicknesses. The estimated pre-tax budget is CAD$375,000 plus HST, with a required delivery and installation date no later than December 2026. All submissions must be made electronically via the BonfireHub platform by June 16, 2026, at 12:00 PM ET, and must include mandatory documentation such as the Submission Form, Rate Bid Form, Reference Form, Technical Requirements Questionnaire, Sustainability Commitment, and Proponents Checklist. Proposals will be evaluated based on experience, technical capability, service and support, sustainability initiatives, value-added ideas, accessibility under the AODA, and pricing, with potential for post-evaluation negotiations with selected suppliers. This procurement is governed by the Canadian Free Trade Agreement and the Canada-European Union Comprehensive Economic Trade Agreement, and all submissions must be in English. The full tender documents, which supersede any information in this notice, are available at no cost on the BonfireHub portal, with additional details accessible through Merx.com, though fees may apply there.

General Info

Western seeks PECVD tool proposals for nanofabrication; budget CAD 375,000; submission by June 16, 2026.

Agency

Government of Canada → University of Western Ontario

NAICS

333242 - Semiconductor Machinery Manufacturing View NAICS

Place of Performance

CAN

Set-Aside

NONE

Documents

(0)

No documents available

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Timeline

PhaseClosed
Posted

Solicitation

Response Deadline

Deadline has passed

Submission Closed

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Organization & Contact Information

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AgencyGovernment of Canada → University of Western Ontario
Contacts1 person available
OfficeN/A
Organization / Agency
Government of Canada → University of Western Ontario
Office AddressN/A
Contacts
Scott RothContracting Authority
contact@example.gov

Full Description

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Suppliers can find the complete tender document(s), at no cost, on: https://uwo.bonfirehub.ca. Procuring Entity: University of Western Ontario (Western) Procurement Services 1151 Richmond Street London, Ontario, Canada, N6A 3K7 Contact: Scott Roth sroth6@uwo.ca Procurement Method: Open tender whereby all interested Suppliers may submit a Proposal. Description: The Request for Proposal (RFP) is an invitation to submit offers for the Supply and Install of a Plasma Enhanced Chemical Vapor Deposition, as further described herein. The Plasma Enhanced Chemical Vapor Deposition (PECVD) tool will be installed in the Western Nanofabrication Facility. Applications will include deposition of silicon oxide, silicon nitride and amorphous silicon on silicon wafers. Both single layers of pre-determined thickness and multi-layer structures of these films are required. Refer to the RFP document for further information. Budget: The estimated total pre-tax budget is CAD$375,000 plus HST. Estimated Quantities: Available within the tender document Submission Details: All tender submissions must be uploaded electronically at https://uwo.bonfirehub.ca Submission Deadline: June 16, 2026 at 12:00 PM ET Public Opening: Not Applicable Conditions for Participation: Available within the tender document(s) Mandatory Submission Requirements: Appendix B- Submission Form Appendix C- Rate Bid Form Appendix D- Reference Form Appendix E- Deliverables and Technical Requirements Questionnaire Appendix F- Western’s Commitment to Sustainability in Procurement and Supporting Documents Appendix G- Proponents Checklist Complete submission requirements are provided within the tender document(s). Scored Submission Requirements: Mandatory Requirements Experience, Qualifications and References Technical Requirements Service and Support Sustainability Value- Added Ideas Accessibility (AODA) Pricing In-kind This procurement is covered by Chapter 5 of the Canadian Free Trade Agreement (CFTA). This procurement is covered by Chapter 19 of the Canada-European Union Comprehensive Economic Trade Agreement (CETA) Delivery Date: December 2026 Duration of Agreement: Upon receipt of equipment and satisfaction of obligations as set out in the Agreement. Additional Options: Available in the tender document(s) Negotiation: At the end of the evaluation process, Western may identify one or more Suppliers with whom it wishes to enter into negotiations, by written notification. See tender document(s) for further detail. Prequalification: Not Applicable Responses must be submitted in English. Suppliers should note that information contained within this Tender Notice is subject to change. Suppliers are encouraged to download the tender document(s) which contain the most current information. If there is a conflict between the tender document(s) and this Tender Notice, the tender document(s) will take precedence. Bidding and Documents are available on http://www.merx.com. Fees may apply; See https://www.merx.com/public/pricing for more information.