This Sources Sought opportunity from Department Of Defense was posted on June 9, 2026. The submission period has ended. Browse the details below for market research, or find similar active opportunities.

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Atomic Layer Deposition (ALD) Reactor System

Closed

N00173-26-SSN-TB01Federal

Submission Closed06/18/2026, 09:00:00 PM UTC

Contract Overview

Solicitation details, issuing organization, response deadlines, documents, and interested companies for this government contract opportunity.

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1 day ago

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in 7 days

AI Contract Overview

The Naval Research Laboratory (NRL) in Washington, DC, has issued a Sources Sought Notice (SSN) for an Atomic Layer Deposition (ALD) Reactor System under solicitation number N00173-26-SSN-TB01, posted on June 9, 2026, with responses due by June 18, 2026. This notice is strictly for market research and procurement planning and does not constitute a solicitation, request for proposal, or any promise of a future contract. The Government will not pay for responses or incur any financial liability for costs incurred by respondents. The requirement calls for a dual-mode ALD system capable of both traditional thermal ALD and plasma-enhanced ALD (PE-ALD), featuring a single hot-walled, viscous flow reaction chamber constructed of copper-free stainless steel, with integrated inductively coupled plasma (ICP) source requiring at least four plasma gas lines (expandable to six or more), automated load-lock transfer using a linear rack and pinion probe, DC heating components, and optional substrate electric bias. The system must be computer-controlled via a Windows-11 or later interface and capable of depositing Al2O3, HfO2, TiN, and TiO2/SiO2 nanolaminates. Technical expectations include a base chamber pressure of 2.0 × 10⁻² Torr or less using 25 feet of exhaust tubing and vacuum leak rates below 1 × 10⁻⁹ Torr-L/s verified by calibrated helium leak detection. Respondents must submit a Capability Statement of no more than seven pages, including company contact information, Unique Entity ID (UEI), CAGE code, business size, NAICS 334513, and PSC codes, along with detailed technical capabilities, documentation of authorized reseller status if applicable, and any intellectual property claims relevant to the specifications. A comprehensive description of how the proposed solution meets or can be modified to meet NRL’s requirements is mandatory, accompanied by a product brochure highlighting compliant features. Commerciality must be explicitly addressed by answering whether the item is customarily used by the public or non-governmental entities, whether it has been sold, leased, or licensed commercially, and whether it qualifies as a commercial item under FAR Part 2. Respondents are also invited to provide a Rough Order of Magnitude for the project’s estimated cost without submitting a formal quote. The system

General Info

NRL seeks industry sources for ALD Reactor System market research; no contract guaranteed.

Agency

Department Of Defense → Naval Research Laboratory

NAICS

334513 - Instruments and Related Products Manufacturing for Measuring, Displaying, and Controlling Industrial Process Variables

Place of Performance

Washington, DC, USA

Set-Aside

NONE

Documents

Specifications for Atomic Layer Deposition Reactor - NRL-DC

specifications

High

AI Contract Breakdown

Uniform Contract Format

Timeline

PhaseClosed

PostedJun 9

Sources Sought

Response DeadlineJun 18

Deadline has passed

Submission Closed

06/18/2026, 09:00:00 PM UTC

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Organization & Contact Information

AgencyDepartment Of Defense → Naval Research Laboratory

Contacts1 person available

OfficeWASHINGTON, DC, 20375-5328, USA

Organization / AgencyDepartment Of Defense → Naval Research Laboratory

Office AddressWASHINGTON, DC, 20375-5328, USA

Contacts

TALISA BOYD

contact@example.gov

Full Description

THIS IS A SOURCES SOUGHT NOTICE (SSN) AND NOT A SOLICITATION OR ANINDICATION THAT A CONTRACTUAL COMMITMENT WILL EXIST AS A RESULT OFTHIS SSN.

This Sources Sought Notice (SSN) is in support of market research and procurement planning being conducted by the Naval Research Laboratory(NRL), Washington, DC. This SSN is for informational and planning purposes only and does not guarantee that this will be competed via beta.sam.gov. The Government assumes NO financial responsibility for any costs incurred. A solicitation package is not available at this time.

I. LOCATION:
Contracting Office Address: NRL, 4555 Overlook Avenue, SW, Washington, DC

II. OBJECTIVE:
The intent of this SSN is to gauge industry interest and search for potential sources capable of satisfying the NRL's requirement, as well and determine the commerciality of the items. A draft of the minimum technical requirements for the effort are in the attached specifications. The NRL is currently in the planning stages for this procurement and may continue to modify the language within the requirement, as necessary. These specifications do not necessarily represent the final specifications.

III. REQUIRED CONTRACTOR RESPONSE FORMAT:
Interested parties, at a minimum, shall supply ALL of the below required information in a Capability Statement.

A. CONTACT INFORMATION:
1) Company Name and Address
2) Point of Contact for questions/clarification
3 Telephone Number and e-mail address
4) Unique Entity ID (UEI) Number, CAGE Code, and business size
5) NAICS and PSC Code of the proposed solution (SEE https://psctool.us)
6) Business Size Standard /Socioeconomic Categories

B. TECHNICAL INFORMATION:
1) List of capabilities/resources relevant to the attached specification list.
2) If a reseller, document authorized reseller
3) Any documented information indicating a copyright, patent, or uniqueness that is specific to a specification required by NRL.

C. COMMERCIALITY OF PROPOSED ITEM (answer all questions):

1) Is /Are recommended instruments of a type customarily used by the general public or by non-governmental entities for purposes other than governmental purposes?
___ YES; explain
___ NO; explain

i. Has the recommended instrument been sold, leased, or licensed to the general public; or
If YES, identify one or more such sales, leases, or licenses to document the commerciality of the item.

ii. Has the recommended instrument been OFFERED for sale, lease, or license to the general public?

2. Has the recommended instrument evolved from an item described above through advances in technology or performance and that is not yet available in the commercial marketplace, but will be available in the commercial marketplace in time to satisfy the delivery requirements under a Government solicitation?

3. Does the recommended instrument qualify as a commercial item, in accordance with any other part of the definition of a commercial item, found in FAR Part 2?

D. PRODUCT DESCRIPTION / CAPABILITY:

1) Provide a brief written description of how the recommended product or solution will meet or exceed the specifications, in the attached specifications.
Please note that merely submitting a spec sheet does not allow the NRL to determine whether the suggested product will meet, or could be modified to meet, specifications.
If there is a specification that your product does not meet, please indicate how your proposed product could be modified to meet the specifications.

2) Provide a product brochure and highlight the areas that meet or exceed specifications.

E. ROUGH ORDER OF MAGNITUDE

You are invited to submit a rough order of magnitude, for the overall, estimated cost of the project. Please do not submit a quote. A quote or proposal is not being requested and will not be accepted.

F. COMMENTS AND RECOMMENDATIONS
You are invited to off er your comments and recommendations regarding the specifications.

IV. ADDITIONAL REQUIREMENT DETAILS:
Responses should be limited to no more than 7 pages.

V. FAR PROVISION(S)
FAR 52.215-3 -- REQUEST FOR INFORMATION OR SOLICITATION FOR PLANNINGPURPOSES (OCT 1997)

(a) The Government does not intend to award a contract on the basis of this solicitation or to otherwise pay for the information solicited except as an allowable cost under other contracts as provided in subsection 31.205-18, Bid and proposal costs, of the Federal Acquisition Regulation.

(b) Although "proposal" and "offeror" are used in this Request for Information, your response will be treated as information only. It shall not be used as a proposal.