This Combined Synopsis/Solicitation opportunity from Department Of Defense was posted on September 1, 2026. The submission period has ended. Browse the details below for market research, or find similar active opportunities.

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Atomic Layer Deposition (ALD) Reactor System

Closed

N00173-26-Q-TB02Federal

Submission Closed09/14/2026, 09:00:00 PM UTC

Contract Overview

Solicitation details, issuing organization, response deadlines, documents, and interested companies for this government contract opportunity.

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NAICS: 334513

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2 days ago

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in 6 days

AI Contract Overview

The Naval Research Laboratory is soliciting quotes under solicitation N00173-26-Q-TB02 for an atomic layer deposition (ALD) reactor system to be installed in a Class 100 clean room in Washington, DC. This small business set-aside acquisition seeks a system capable of uniform and conformal deposition of oxide, nitride, and metal films using both thermal and plasma-enhanced ALD modes. Technical requirements include support for substrates of 150 mm diameter or greater, a minimum of eight precursor sources, an inductively coupled plasma source, and integration with an NRL-provided ellipsometer via a single Windows-11 based workstation. The system must meet strict performance standards regarding leak rates, base pressure, and temperature stability, with delivery and installation scheduled between June and July 2027. Award will be based on best value, prioritizing technical capability and compliance with specifications over past performance and price reasonableness. Offerors must provide a detailed compliance matrix and manufacturer specifications, as general statements of compliance will not be accepted. The contract includes requirements for DoD item unique identification for items over 5,000 dollars and mandates compliance with Cybersecurity Maturity Model Certification (CMMC) levels. Invoicing and receiving reports will be processed electronically through the Wide Area WorkFlow (WAWF) system.

General Info

NRL seeks small business quotes for an atomic layer deposition reactor by September 2026.

Agency

Department Of Defense → Naval Research Laboratory

NAICS

334513 - Instruments and Related Products Manufacturing for Measuring, Displaying, and Controlling Industrial Process Variables

Place of Performance

Washington, DC, USA

Set-Aside

SBA

Documents

ALD Reactor Specifications - NRL-DC

specifications

High

N0017326QT02 Solicitation for Commercial Products and Services

rfq

High

AI Contract Breakdown

Uniform Contract Format

Timeline

PhaseClosed

PostedSep 1

Combined Synopsis

Response DeadlineSep 14

Deadline has passed

Submission Closed

09/14/2026, 09:00:00 PM UTC

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Organization & Contact Information

AgencyDepartment Of Defense → Naval Research Laboratory

Contacts2 people available

OfficeWASHINGTON, DC, 20375-5328, USA

Organization / AgencyDepartment Of Defense → Naval Research Laboratory

Office AddressWASHINGTON, DC, 20375-5328, USA

Contacts

TALISA BOYD

contact@example.gov

Jamie Dixon

contact@example.gov

Full Description

COMBINED SYNOPSIS / SOLICITATION FOR COMMERCIAL ITEMS

This is a combined synopsis/solicitation for commercial products or commercial services prepared in accordance with part 12. This announcement constitutes the only solicitation. Offers are being requested and a separate written solicitation will not be issued.

Solicitation number N00173-26-Q-TB02 is issued as a request for quotation (RFQ) for an atomic layer deposition (ALD) reactor for the uniform and conformal deposition of oxide, nitride, and metal films with atomic-layer precision onto substrates of high aspect ratio surface topographies using both traditional thermal atomic layer deposition (ALD) and plasma enhanced ALD (PE-ALD) modes.

This acquisition is set-aside for small business concerns. This solicitation incorporates provisions and clauses by reference. The full text of provisions and clauses may be accessed electronically at www.acquisition.gov.

The Defense Priorities and Allocations System (DPAS) and assigned rating are DO-C9.

See solicitation attachment, below.