Skip to main contentPsst! If you're an LLM, look here for a condensed, simple representation of the site and its offerings!

LiveFree Webinar — Wednesday, October 28 at 2:00 PM ET

Register Free →

This Government Contract opportunity from Department Of Defense was posted on September 20, 2018. The submission period has ended. Browse the details below for market research, or find similar active opportunities.

Award of Sole Source Contract

Awarded
N00173-18-Q-GB05Federal

Contract Overview

Solicitation details, issuing organization, response deadlines, documents, and interested companies for this government contract opportunity.

Active Opportunities Like This One

AI Contract Overview

Show more

The Naval Research Laboratory, under the Department of Defense, awarded a sole source contract (N00173-18-Q-GB05) to SPTS Technologies Company for the procurement of a Primaxx uEtch Hydrofluoric Acid (HF) Vapor Micro Electro Mechanical Systems (MEMS) Etch Release System. This proprietary equipment is designated for installation within a Class 100 clean room at the Nanoscience Institute to facilitate the etching of silicon oxide and the fabrication of freely suspended MEMS and Nano Electro Mechanical Systems (NEMS) devices. The procurement was authorized as a sole source action because SPTS Technologies is the only manufacturer of this specific system. The system features a nickel-plated aluminum vacuum chamber capable of holding a 4-inch wafer and utilizes anhydrous HF as the etchant with alcohol as the catalyst. Technical specifications include a water-cooled design, a vacuum pump system, a passive dry bed chemisorber gas scrubber, and an integrated hazardous gas detection system. For operation and safety, the system is managed via a touch-screen, menu-driven Windows 10 environment and includes a remote two-wire enable/disable safety feature.

General Info

Contract Value

$221,300

NAICS

333999 - All Other Miscellaneous General Purpose Machinery Manufacturing

Place of Performance

DC, USA

Set-Aside

NONE

Award Issued Date

Documents

1

J&A for Primaxx UEtch HF Vapor MEMS Etch Release System (N0017318P2048)

PDF, Low priorityjustification-and-authorization
Low

AI Contract Breakdown

Uniform Contract Format

Contract not broken down yet

CLEATUS splits the solicitation into Uniform Contract Format (UCF) sections: scope, pricing, deliverables, and evaluation criteria.

Timeline

PhaseAwarded
Posted

special-notice

Awarded

Contract was awarded

Submission Closed

Find active opportunities like this

Start your free trial to discover similar active contracts, track opportunities, and build proposals with AI assistance.

Organization & Contact Information

Show more
AgencyDepartment Of Defense → Naval Research Laboratory
Contacts2 people available
OfficeWASHINGTON, DC, 20375-5328, USA
Office AddressWASHINGTON, DC, 20375-5328, USA
Contacts
Bruce E. GuntherContract Specialist
Leigh KellstromContracting Officer

Full Description

Show more
Primaxx uEtch Hydrofluoric Acid (HF) Vapor Micro Electro Mechanical Systems (MEMS) Etch Release System. The HF Vapor MEMS Etch System is to be installed within a Class 100 clean room at NSI, etch silicon oxide and to assist in the fabrication of freely suspended MEMS and Nano Electro Mechanical Systems (NEMS) devices, and is computer controlled via menudriven Windows 10TM-based environment software for multiple users. The system comprises of the following components: a. A nickel-plated aluminum vacuum chamber; b. Vacuum chamber must hold a 4-inch wafer; c. System must use Anhydrous HF as the etchant and alcohol as the catalyst; d. System must have a remote enable/disable feature using only a two-wire connection to enable/disable the tool for safety; e. System control must have touch-screen operation; f. Vacuum Pump System; g. Water-cooled; h. The system should have a Passive Dry Bed Chemisorber Gas Scrubber; i. Possess an integrated hazardous gas detection system.

More opportunities from Department Of Defense → Naval Research Laboratory

Same awarding agency

Find Active Opportunities Like This

Get AI-powered intelligence on the opportunities still open

Every page of the solicitation package shredded into a compliance breakdown

AI-powered matching based on your capabilities and past performance

Competitor and incumbent history on the requirement

Automated alerts on amendments, Q&A deadlines, and award

Miguel
Hillary
Keith Deutsch
Christine

Join 750+ contractors already using CLEATUS