This Government Contract opportunity from Department Of Defense was posted on September 20, 2018. The submission period has ended. Browse the details below for market research, or find similar active opportunities.
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The Naval Research Laboratory, under the Department of Defense, awarded a sole source contract (N00173-18-Q-GB05) to SPTS Technologies Company for the procurement of a Primaxx uEtch Hydrofluoric Acid (HF) Vapor Micro Electro Mechanical Systems (MEMS) Etch Release System. This proprietary equipment is designated for installation within a Class 100 clean room at the Nanoscience Institute to facilitate the etching of silicon oxide and the fabrication of freely suspended MEMS and Nano Electro Mechanical Systems (NEMS) devices. The procurement was authorized as a sole source action because SPTS Technologies is the only manufacturer of this specific system. The system features a nickel-plated aluminum vacuum chamber capable of holding a 4-inch wafer and utilizes anhydrous HF as the etchant with alcohol as the catalyst. Technical specifications include a water-cooled design, a vacuum pump system, a passive dry bed chemisorber gas scrubber, and an integrated hazardous gas detection system. For operation and safety, the system is managed via a touch-screen, menu-driven Windows 10 environment and includes a remote two-wire enable/disable safety feature.
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