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Dry Pumps, Kashiyama Model MU100GP, Ebara Model ESR20N, or equivalent

Awarded
1333ND26QNB030119Federal

Contract Overview

Solicitation details, issuing organization, response deadlines, documents, and interested companies for this government contract opportunity.

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The contract solicits two new dry roughing pumps—specifically the Kashiyama Model MU100GP, Ebara Model ESR20N, or an equivalent—under a firm-fixed-price arrangement for use in NIST’s semiconductor research and metrology programs. The equipment must meet stringent technical specifications, including a minimum pumping speed of 30 CFM, an ultimate pressure of no more than 9.75 mTorr, corrosion-resistant Ni-alloy internals, PFPE lubrication, and compliance with CE, SEMI, and NRTL safety standards. The pumps must be new, factory-sealed, and free from gray-market, used, prototype, or refurbished components. Delivery is required within 16 weeks of order placement under FOB Destination/DDP terms, with acceptance occurring at NIST’s facility in Gaithersburg, Maryland. The award will follow the Lowest Price Technically Acceptable (LPTA) method, where only technically compliant offers proceed to price evaluation, with no trade-offs permitted between technical superiority and cost. Electronic submission of quotations is mandatory via email to designated NIST contacts, structured in three volumes: technical documentation, firm-fixed pricing, and compliance with all contract clauses. Invoicing must be submitted electronically through the Treasury’s Invoice Processing Platform or via email to INVOICE@NIST.GOV, and payment is contingent upon formal acceptance after inspection. Contractors must maintain active SAM.gov registration, provide a Unique Entity Identifier, and comply with multiple FAR clauses, including provisions on Buy American, drug-free workplace, electronic funds transfer, and prohibitions against contracting with inverted domestic corporations or entities requiring confidentiality agreements that restrict reporting of illegal activity. Special NIST requirements include adherence to campus operating status updates, no security clearance needs, and strict prohibition of partial shipments without written approval. The contract also incorporates deviation clauses for several FAR provisions, indicating tailored compliance expectations, and mandates full acceptance of all terms upon quotation submission unless explicitly objected to in writing.

General Info

Procurement of Kashiyama or Ebara dry pumps for NIST in Gaithersburg, response due March 25, 2026.

Agency

Department Of Commerce NistView Agency

Contract Value

$44,570.42

NAICS

333242 - Semiconductor Machinery ManufacturingView NAICS

Place of Performance

Gaithersburg, MD, 20899, USA

Set-Aside

NONE

Awardee

EBARA TECHNOLOGIES INCView Profile

Award Issued Date

Documents

(3)

RFQ 1333ND26QNB030119 for Dry Roughing Pumps

DOCXrfq

Provisions and Clauses for Solicitation 1333ND26QNB030119

DOCXprovisions-clauses

Statement of Work for Dry Roughing Pumps at NIST MML CSD

DOCXsow

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Timeline

1 update
PhaseAwarded
Posted

Combined Synopsis

Amendment 1

Contract was updated

Awarded

Contract was awarded

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Organization & Contact Information

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AgencyDepartment Of Commerce Nist
Contacts2 people available
OfficeGAITHERSBURG, MD, 20899, USA
Organization / Agency
Department Of Commerce Nist
View Agency Profile
Office AddressGAITHERSBURG, MD, 20899, USA
Contacts
Ranae M. Armstrong
Donald Collie

Full Description

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https://api.sam.gov/prod/opportunities/v1/noticedesc?noticeid=6cd5ed597b9b46009e789def7567fe32

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