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This Government Contract opportunity from Government of Canada was posted on June 12, 2026. The submission period has ended. Browse the details below for market research, or find similar active opportunities.

Inductively Coupled Plasma (ICP) Processing Module

Closed
International

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The contract involves the supply and delivery of an Inductively Coupled Plasma (ICP) etch module designed to be compatible with the existing KLA/SPTS Omega fxP platform, which is utilized in semiconductor fabrication processes. This subcontract opportunity is issued by the National Research Council of Canada, under the Government of Canada, and targets suppliers capable of providing advanced equipment for semiconductor manufacturing technologies. The solicitation was posted on June 12, 2026, with a response deadline of June 29, 2026, indicating a relatively short window for submission. The contract falls under the NAICS code 333242, which relates to semiconductor and other electronic component manufacturing machinery. The work will be performed in Canada, aligning with the government’s efforts to support domestic technology and research capabilities in high-tech sectors. Interested parties are prompted to respond promptly, considering the firm deadlines and specialized nature of the contract.

General Info

Supply and delivery of ICP etch module compatible with KLA/SPTS Omega fxP for semiconductor fabrication.

Agency

Government of Canada → National Research Council of CanadaView Agency

NAICS

333242 - Semiconductor Machinery ManufacturingView NAICS

Place of Performance

Canada, CAN

Set-Aside

NONE

Documents

This scope was carved out of 26-58022.

The full solicitation package (2 documents), including the RFP, is on the prime solicitation, not on this scope.

View the prime solicitation

ACAN 26-58022 Automated Wafer Defect Inspection System and ICP Plasma Processing Module

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Timeline

PhaseClosed
Posted

subcontract

Response Deadline

Deadline has passed

Submission Closed

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Organization & Contact Information

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AgencyGovernment of Canada → National Research Council of Canada
ContactsNo contacts available
OfficeN/A
Organization / Agency
Government of Canada → National Research Council of Canada
View Agency Profile
Office AddressN/A
ContactsNo contact information available

Full Description

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Supply and delivery of an ICP etch module compatible with the existing KLA/SPTS Omega fxP platform for semiconductor fabrication processes.

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Same awarding agency

NAICS: 334516
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The National Research Council Canada is soliciting proposals for a fully automated liquid-dispensing robot to be integrated into a material acceleration platform at the NRC Mississauga facility. The required system must be designed for high-throughput and complex workflows, featuring a modular architecture with interchangeable pipettes, grippers, and on-deck modules for heating and stirring. Key technical mandates include the use of 8-channel or higher pipettes with a capacity of 1-1000 µL or greater, an open protocol library, and open-source software API for configuration and integration. The hardware must support dual-band Wi-Fi, USB 2.0, and Ethernet connectivity. The procurement process is an open Request for Proposal with a closing date of September 22, 2026. Evaluation is based on mandatory technical criteria and a financial assessment of the total aggregated cost for the robot, installation, and training. Successful delivery is required within 16 weeks of the contract award, following Delivery at Place (DAP) terms. The contract emphasizes green procurement, requiring reusable, returnable, or recyclable packaging. Bidders must submit their proposals via email in three distinct sections covering technical, financial, and administrative requirements, ensuring compliance with Canadian electrical standards and security clearance protocols.
Analytical Laboratory Instrument Manufacturing

POSTED

1 day ago

DEADLINE

in 10 days
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