IFB Chemical Vapor Deposition System & Etching System

Texas A&M University is soliciting bids for a Chemical Vapor Deposition (CVD) system and a Reactive Ion Etching (RIE) system under Invitation for Bid TAMU-28-EQUI-ITB-1699, with responses due by June 16, 2026. The requested equipment, though referenced by Plasma-Therm Plasma-Pod Plus models, is open to equivalent systems provided bidders submit full technical specifications, manufacturer details, and model numbers for evaluation. The agency retains final authority on equivalency determinations. Both systems must include a stainless steel chamber, a 300W, 13.56MHz RF generator with auto-match, a Cortex control system with recipe storage and data logging, a temperature-controlled electrode capable of reaching 350°C, an external gas box with 3 to 6 gas lines including mass flow controllers for common gases like O₂, Ar, CF₄, SF₆, and Silane, and a dry rotary backing pump. The systems must comply with ISO 63 for vacuum ports and include a minimum 12-month warranty covering defects in materials and workmanship. Delivery must be made FOB Destination or DDP to College Station, Texas, with all shipping, duties, and fees prepaid by the vendor and no additional charges permitted. Payment is Net 30 days after receipt and acceptance of the goods. Bidders are required to affirmatively certify compliance with Executive Order GA-48, ensuring no use of telecommunications or surveillance equipment from entities listed under NDAA Sections 889 and 1260H or 15 C.F.R. § 791.4, and certify compliance with HB 127, affirming no use of software from entities on the HERSC List, with false certifications resulting in immediate contract termination. No UEI, CAGE, size status, or socioeconomic certifications are required. Evaluation for award is based on best value, considering non-price factors such as quality, bidder capability, delivery timeline, service support, financial stability, and past performance, in addition to price. Proposals must be submitted electronically via the AggieBid portal by the deadline, and no attachments or physical submissions are accepted. The contract contains no formal packaging, marking, barcoding, or military standard requirements, though clear labeling of country of origin, HTS code, manufacturer, and model is mandatory. The contracting officer is David Kirk, and all inquiries must be directed through the Ag