Inductively Coupled Etching System

Argonne National Laboratory is soliciting quotations for a single inductively coupled plasma etching system with atomic layer etching capabilities, to be delivered, installed, and commissioned at its facility in Lemont, Illinois, under the Statement of Work dated April 27, 2026. The system must support 3-, 4-, and 6-inch wafers, operate in both ICP-RIE and ALE modes with 13.56 MHz RF power, include a load-lock and electrostatic chuck with temperature control from -20°C to 200°C, enable in-situ optical monitoring, handle reactive gases such as Cl, F, and O₂, feature a deposition-resistant chamber with integrated hazardous gas safety interlocks, and come with comprehensive documentation, operator training, spare parts, and warranty support. Award will be made on a Lowest Price, Technically Acceptable basis, requiring vendors to submit a completed ANL-70 Request for Quotation with pricing and technical evidence, along with the ANL-70B Representations and Certifications. The solicitation is open only to vendors who can demonstrate full compliance with all technical, safety, and quality requirements, including traceability to NIST standards for calibration, adherence to ASTM D120 for electrical gloves, and compliance with NIOSH and ISO GUIDE 31:2000 standards for labeling and material certification. The contract includes stringent packaging, preservation, and marking requirements, mandating that all items bear unique serial and lot numbers, and that age-sensitive components are stored under documented environmental controls. All equipment must meet Argonne’s specific site safety protocols, including compliance with DOE-STD-1090, and all personnel must hold REAL ID credentials, complete safety orientations, and submit signed Job Safety Analysis forms prior to site access. Cybersecurity obligations require vendors to implement commercially reasonable protections for laboratory data, report breaches within 10 business days, and indemnify the Laboratory for liability related to data compromises. Performance is defined by delivery within eight months of order acceptance, with FOB Destination terms for domestic shipments and DAP for international deliveries. Full ownership of the system transfers to the government upon formal acceptance at Argonne’s Lemont location, and all documents must be submitted as a single hard copy to Molly Hunter at the specified address no later than 5:00 p.m. CDT on May 26, 2026. Payment will be processed via check, ACH,