PlasmaPro 100 Estrelas Bosch and Cryogenic Deep Reactive Ion Etching Tool

NASA/GSFC has a requirement for a PlasmaPro 100 Estrelas Bosch and Cryogenic Deep Reactive Ion Etching Tool. NASA/GSFC intends to purchase the items from Oxford Instruments America, Inc. because they are the only manufacturer to our knowledge that provides an inductively coupled plasma etching system enabling both Bosch and Cryogenic etching processes. The Government intends to acquire a commercial item using FAR Part 12. Oral communications ARE NOT acceptable in response to this notice. All responsible sources may submit an offer which shall be considered by the agency. NASA Clause 1852.215-84, Ombudsman, is applicable. The Center Ombudsman for this acquisition can be found at http://prod.nais.nasa.gov/pub/pub_library/Omb.html.