66--Metal Organic Chemical Vapor Deposition Chamber

The purpose of this second modification/amendment is to extend the close date to 11:59 Eastern Time, 03 March 2015. (i) This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; proposals are being requested and a written solicitation will not be issued. (ii) The solicitation number is: W911QX-15-T-0072. This acquisition is issued as a Request for Quotation (RFQ). (iii) The solicitation document and incorporated provisions and clauses are those in effect through: Federal Acquisition Circular 2005-78 (December 26, 2014). (iv) This acquisition is: for a Small Business Set-Aside - Total. The associated NAICS code is 334516. The small business size standard is 500. (v) The following is a list of contract line item number(s) and items, quantities and units of measure, (including option(s), if applicable): CLIN 0001 The Contractor shall provide a custom Metal Organic Chemical Vapor Deposition Chamber that conforms to the minimum requirements listed below (also see attachment titled Requirements_Attachment in case of formatting errors): 1. Substrate heater a. Diameter: 3 inches b. Number of filaments: two (2) c. Filament material: Rhenium d. Filament style: plate e. Temperature range: room temp to 1400 Celsius (C) f. Number of thermocouples: two (2) g. Thermocouple type: type C h. Heat shielding (four (4) layers minimum) 2. Water cooled gas showerhead a. Modular design - can be replaced on site by ARL personnel b. Diameter at substrate: 3 inches c. Adustable height (2 inch minimum travel, default height at 2.5 inch, range 1 inch) d. Ports i. Seven (7) gas injector ports (0.25 inch Variable Compression Ratio fitting (VCR)) confined within 3 inches diameter from center 1. Or five (5) 0.25 inch VCRs + two (2) 0.125 inch VCRs ii. Two (2) water ports for cooling iii. Hole through entire showerhead body 1. Location: aligned to viewport in top flange 2. Diameter: 0.5 inch 3. Top flange a. Material: stainless steel (304 or 316) b. Diameter: 6 inches c. Mounting flange: i. 6 inch conflat (CF) d. Water cooled e. Ports: i. Seven (7) gas injector ports 1. All 0.25 inch VCR 2. Or five (5) 0.25 inch VCRs + two (2) 0.125 inch VCRs ii. Two (2) water ports for cooling top flange 1. 0.25 inch tube iii. Viewport 1. 1.33 inch CF window 2. Nipple welded at 5 degree incline to top flange 3. Purge port for window iv. Purge for chamber wall 1. 0.25 inch VCR v. Two (2) water ports for cooling gas showerhead 1. 0.25 inch VCR 4. Chamber body a. Cylindrical chamber geometry b. Mounting plate for chamber matched to Army Research Laboratory (ARL)'s Government-owned glovebox (reference Attachment 1 below) c. Material: stainless steel (304 or 316) d. Diameter: 6 inches e. Water cooled (double-walled) f. Ports: i. 6 inch CF top port ii. 6 inch CF bottom port iii. 6 inch CF side port iv. 2.75 inch CF side port for viewport (with shutter or purge) v. Two (2) water ports for cooling side walls 1. 0.25 inch tube vi. Viewport purge and shutter port for viewport 1. 0.25 inch VCR for purge and 1.33 inch CF for shutter 5. Bottom flange a. Material: stainless steel (304 or 316) b. Diameter: 6 inches c. Mounting flange i. 6 inch CF d. Ports: i. Four (4) power feedthroughs 1. 1.33 inch CF ii. Thermocouple port for two thermocouples 1. 1.33 inch CF iii. Welded tee for exhaust, rotation mount 1. Water cooled 6. Substrate rotation motor assembly a. Mounting i. Vacuum o-ring or CF seal to tee on bottom flange b. Communications i. Accepts 0-10 volts (V) analog input for rotation speed c. Speed range i. Minimum speed: 500 Revolutions Per Minute (RPM) ii. Maximum speed: 1200 RPM d. Susceptor-to-spindle tip mounting mechanism for stable rotation at high rpm 7. Load lock chamber a. Material: stainless steel (304 or 316) b. Diameter: 6 inches c. Mounting flange: i. 6 inch CF d. Ports i. 2 x 6 inch CF ports (One (1) each on left and right sides) ii. Vent port 1. 0.25 inch VCR iii. Access door iv. 2.75 inch CF Pumping port e. Gatevalve i. 6 inch CF flanges ii. Pneumatic operation iii. Orientation: vertical, bonnet facing up iv. Seal plate gasket: vulcanized viton rubber v. One (1) purge port (0.25 inch VCR) and shutter 1. Shutter should be as close to the reactor wall as possible 2. Purge port between shutter and gatevalve f. Access hatch i. 6 inch CF ii. Viton o-ring seal iii. Window built into door g. Linear travel arm i. Travel sufficient to reach substrate heater for loading ii. Adjustable alignment iii. 6 inch CF flange for mounting to load lock iv. Contains susceptor holder for loading 8. Delivery/Installation a. The Contractor shall propose a specific delivery date and time to the Technical Point of Contact (TPOC) at least two (2) weeks prior to shipping. The TPOC will approve or deny the proposed date and time within three (3) days. b. Upon delivery, the Contractor shall ensure proper installation and integration of all components (1-8) listed above. 9. Attachment 1: SEE ATTACHED (vii) Delivery is required: within four (4) months After Receipt of Order (ARO). Delivery shall be made to US Army Research Laboratory, Adelphi, MD. Acceptance shall be performed at US Army Research Laboratory, Adelphi, MD. The FOB point is US Army Research Laboratory, Adelphi, MD. (viii) The provision at 52.212-1, Instructions to Offerors - Commercial, applies to this acquisition. The following addenda have been attached to this provision: None. (ix) The provision at FAR 52.212-2, Evaluation - Commercial Items is applicable to this acquisition. The specific evaluation criteria to be included in paragraph (a) of that provision are as follows: The Government will award a contract resulting from this solicitation to the responsible offeror whose offer conforms to the solicitation and will be most advantageous to the Government, price and other factors considered. The following factors shall be used to evaluate offers: Technical, Past Performance and Price. The Technical element of the evaluation will be a determination as to whether the proposed product meets the performance characteristics and specifications in the solicitation. The Technical element of the evaluation shall be based solely on information furnished by the vendor. The Government is not responsible for locating or securing any information, which is not identified in the proposal. To ensure sufficient information is available, vendors must furnish as part of their proposal all descriptive material (such as cuts, illustrations, drawings, or other information) necessary for the Government to determine whether the product meets the performance characteristics and specifications of the requirement. If the offeror proposes to modify a product so as to conform to the requirement of this solicitation, the offeror shall include a clear description of such proposed modifications and clearly mark any descriptive materials to show modifications. Past performance will be evaluated based on information provided by the offeror as to actual sales of the proposed product to industry or Government agencies. Past performance will consider the ability of the offeror to meet technical specifications, delivery schedules (with warranty fulfillment and maintenance reputation included as applicable). Offerors shall include three (3) relevant records of sales from the previous nine (9) months. Offerors shall identify a point of contact for each sale by providing a name and telephone number. Price will be evaluated based on the total proposed price, including options, (if any). Technical and past performance are of equal importance and when combined are significantly more important than price. The Government reserves the right to award to other than the lowest price and to award without discussions. (x) Offerors shall include a completed copy of the provision at FAR 52.212-3, Offeror Representations with its offer. (xi) The clause at 52.212-4, Contract Terms and Conditions - Commercial Items, applies to this acquisition. The following addenda have been attached to this clause: None (xii) The clause at 52.212-5, Contract Terms and Conditions Required to Implement Statutes or Executive Orders - Commercial Items and the selected clauses listed in DFARS 212.301 Solicitation provisions and Contract Clauses for the Acquisition of Commercial Items, applies to this acquisition. The following additional FAR/DFARS clauses cited in this clause are applicable: 52.203-3, 52.203-6, 52.203-6 Alt1, 52.204-4, 52.204-10, 52.209-6, 52.219-6, 52.219-8, 52.219-14, 52.219-28, 52.222-3, 52.222-19, 52.222-21, 52.222-26, 52.222-35, 52.222-36, 52.222-37, 52.222-40, 52.223-18, 52.225-13, 52.232-33, 52.252-1, 252.203-7000, 252.203-7005, 252.204-7011, 252.204-7012, 252.204-7015, 252.209-7001, 252.223-7008, 252.244-7000, 252.225-7000, 252.225-7001, 252.252-7012, 252.225-7031, 252.232-7003, 252.232-7010 , 252.243-7002, 252.247-7022, 252.247-7023. (xiii) The following additional contract requirement(s) or terms and conditions apply (full text of all local clauses can be found in the attached ACC-APG Adelphi Local Clauses Full Text document): 252.232-7006 Wide Area Workflow Payment Instructions (May 2013); 252.211-7003 Item Unique Identification and Valuation (Dec 2013); APG-ADL-B.5152.204-4409 ACC - APG Point of Contact (Apr 2011); APG-ADL-B.5152.204-4411 Technical Point of Contact (Dec 2002); APG-ADL-B.5152.216-4407 Type of Contract (Sep 1999); APG-ADL-E.5152.246-4400 Government Inspection and Acceptance (Sep 1999); APG-ADL-G.5152.232-4418 Tax Exemption Certificate (Sep 1999); APG-ADL-H.5152.205-4401 Release of Information by Manufacturers, Research Organizations, Educational Institutions, and Other Commercial Entities Holding Army Contracts (Aug 2006); APG-ADL-H.5152.211-4401 Receiving Room Requirements- ALC (SEPT 1999) APG-ADL-H-5152.237-4402 Vehicle Registration (Aug 1999) APG-ADL-H.5152.237-4404 Identification of Contractor Employees (Jul 2004) APG-ADL-H.5152.237-4405 Government-Contractor Relationships (August 2008) APG-ADL-L.5152.203-4440 AMC-Level Protest Program (Jul 2011) APG-ADL-L.5152.215-4441 ACC-APG / Adelphi Website; (xiv) This acquisition is rated under the Defense Priorities and Allocations System (DPAS) as N/A. (xv) The following notes apply to this announcement: N/A. (xvi) Offers are due on 03 March 2015 by 11:59 eastern time by email to contact@example.gov AND to contact@example.gov. (xvii) For information regarding this solicitation, please contact: DeAnna Sivage, Contract Specialist, Email: contact@example.gov, Tel: +1 (555) 000-0000