This Government Contract opportunity from Department Of Defense was posted on October 1, 2012. The submission period has ended. Browse the details below for market research, or find similar active opportunities.

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66--Physical Vapor Deposition System

Awarded

N6893612R0071Federal

Submission Closed09/27/2012, 12:00:00 PM UTC

Contract Overview

Solicitation details, issuing organization, response deadlines, documents, and interested companies for this government contract opportunity.

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AI Contract Overview

The Naval Air Warfare Center Weapons Division intends to award a firm fixed price contract for a Physical Vapor Hybrid Deposition system to support research projects at China Lake, California. The required system must feature a 304 SS cylindrical chamber with both sputtering and e-beam capabilities, including four UHV sputtering sources in a con-focal arrangement, an RF ion source, and a substrate holder capable of heating up to 850 degrees Celsius. Technical specifications require a base vacuum of 2.0 x 10-8 Torr and a sputtering deposition uniformity of +/-1.5 percent or better over a 4 inch diameter area. The selected vendor is responsible for delivering a complete system ready for inspection within 18 weeks of the contract award. The scope of work includes installation within a Class 100 clean room at the Michelson Lab, the provision of comprehensive software and maintenance manuals, and a minimum of one week of technical training for two engineers. The procurement also requires the inclusion of the vendor's standard commercial warranty. All proposals were to be submitted for consideration with an anticipated award date of September 28, 2012.

General Info

Agency

Department Of Defense → Naval Air Warfare Center

Contract Value

$386,050

NAICS

333242 - Semiconductor Machinery Manufacturing

Place of Performance

CA, USA

Set-Aside

NONE

Awardee

AJA INTERNATIONAL, INC.

Award Issued Date

09/27/2012, 12:00:00 AM UTC

Documents

No documents available

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Timeline

3 updates

PhaseAwarded

PostedMar 20

Presolicitation

Notice updatedMay 18

Response deadline changed from May 4, 2012 to Jun 18, 2012. The notice description changed.

Deadline changedJun 14

Response deadline changed from Jun 18, 2012 to Jul 18, 2012.

Notice updatedJul 3

Response deadline changed from Jul 18, 2012 to Aug 2, 2012. The notice title changed. The notice description changed.

Type ChangedJul 27

Presolicitation → Solicitation

AwardedSep 27

Contract was awarded

Submission Closed

09/27/2012, 12:00:00 PM UTC

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Organization & Contact Information

AgencyDepartment Of Defense → Naval Air Warfare Center

ContactsNo contacts available

OfficeCHINA LAKE, CA, 93555-6018, USA

Organization / AgencyDepartment Of Defense → Naval Air Warfare Center

Office AddressCHINA LAKE, CA, 93555-6018, USA

ContactsNo contact information available

Full Description

The Naval Air Warfare Center Weapons Division (NAWCWD) China Lake, CA. intends to award a firm fixed price contract for the purchase of a Physical Vapor Hybrid Deposition system with both sputtering and e-beam capabilities in support of new and ongoing research projects. The system shall consist of all components necessary to operate the instrument as an integrated system. The hybrid system shall have the features and capabilities as follows: 1) 304 SS cylindrical chamber with ports available for: (5) 2 inch Ultra High Voltage (UHV) sputtering sources, (1) ion source, (1) UHV multi-pocket linear e-beam source, load-lock, gauges, vacuum pump, deposition controller, substrate holder, (3) viewports, RGA, and additional spares including port available to connect to future chamber to allow in-situ transfer. 2) Hydraulic hoist for chamber lid. 3) System shall include (4) 2 inch UHV sputtering sources in con-focal arrangement. Sources shall have pneumatic shutters, gas injection to target surface, chimney, and in-situ tilting capability for the source to allow source head angle adjustment without breaking vacuum. 4) System must include (2) DC generators (Minimum 500W), (2) RF generators with auto matching network (Minimum 300W), and (1) spare DC generator for future sputtering source. 5) RF ion source for mild milling applications (100 nm) or ion assisted e-beam deposition with power supply and in-situ tilting. 6) Substrate holder shall accommodate up to 4" diameter substrates with heating to 850°C, rotation 0-40rpm, 2 inch z-motion, and substrate shutter. System shall can also accommodate 6 inch diameter substrate with maximum heating to 400°C. 7) The system shall be able to achieve a base vacuum of 2.0 x 10-8 Torr 8) The manufacturer must show a sputtering deposition uniformity of better than or equal to +/-1.5% over a 4" diameter area with 5mm edge exclusion. 9) The system shall be 100% complete and ready for inspection by customer at manufacturer's facility within 18 weeks after receipt of contract. Additional requirements under this procurement include the following: Installation: The system shall be installed by the vendor one week after delivery to NAWCWD China Lake, CA 93555. Installation will be performed by company personnel in the Microelectronics Lab in Michelson Lab (Bldg. 00005, room S2). This room is a Class 100 clean room. The lab has a 5 foot by 10 foot area available with sufficient nitrogen, house vacuum, electrical power, and other typical laboratory supplies needed for this system. Nominal temperature and humidity in the lab is maintained at 20°±2°C and >40% Relative Humidity, respectively. The principle operator of this system has in excess of 5 years of sputter coating experience. Training: The company shall provide one experienced technical person trained in the system being installed for the purpose of providing training to 2 Microelectronics Michelson lab engineers. Training provided will be a minimum of 1 week beginning after system installation at the Naval Air Warfare Command Weapons Division in China Lake, CA. 93555-6108. Manuals: The manufacturer shall provide software manuals for operational processes including maintenance manuals for all system components. Hard copy manuals should be printed on clean room compatible paper and/or provided on CD in pdf file. Warranty: The purchase of this system shall include vendor’s standard commercial warranty. Delivery under this procurement will be shipped to China Lake, CA. 93555. All responsible sources may submit a bid, proposal, or quotation which shall be considered by the agency. Anticipated award date is September 28, 2012. Respond to Tim Mehlhoff by e-mail (preferred) contact@example.gov, fax +1 (555) 000-0000 or mail to Commander, Code 220000D, NAWCWD 429 E. Bowen Road, Mail Stop 4015, China Lake, CA 93555-6108.