66 -- UPGRADE TRINITY DEEP REACTIVE ION ETCHER
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The U.S. Department of Commerce, through the National Institute of Standards and Technology (NIST), intends to negotiate a sole source contract with Surface Technology Systems (STS) for a programming upgrade of the STS Trinity Multiplex computer control system used on the STS Multiplex ICP Deep Reactive Ion Etcher. This upgrade will replace the existing setup of three interconnected computers handling various control functions with a single, enhanced computer system featuring improved software and new plasma control interfaces. The enhancements include advanced pressure switching, improved logging, better alarm handling, and increased reliability, all aimed at simplifying operations and extending system uptime. The contract covers all necessary components, including hardware, software, labor, and travel expenses for complete on-site installation. The procurement will be conducted using Simplified Acquisition Procedures under FAR Part 13 with a threshold not to exceed $100,000. Because the existing control software and electronic hardware are proprietary and only STS is factory authorized for this upgrade, no competitive solicitation is planned. Responses to this notice will help determine if competition might be appropriate, but the anticipated award date is May 4, 2006. The contract solicitation is managed from Seattle, Washington, with the primary point of contact being the purchasing agent, Kelly A Rima.
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