CHIPS R&D Custom Diffractometry and Fourier Ptychography Endstation

Solicitation 1333ND26Q мало-030236 is a firm-fixed-price request for quotation issued by the Department of Commerce National Institute of Standards and Technology for a custom diffractometry and Fourier ptychography endstation. This equipment is required by the Nanoscale Device Characterization Division to support the CHIPS R&D Metrology Program, specifically for the non-destructive three-dimensional measurement of nanoscale features on semiconductor chips using extreme-ultraviolet light in a vacuum environment. The procurement includes a base item for the endstation and several optional line items for installation, training, and various hardware upgrades, such as camera manipulation stages and a new EUV camera. The system must be entirely new, as prototypes or refurbished instruments are prohibited, and must be capable of attaining a 10-6 Torr base pressure. The period of performance is scheduled from July 1, 2026, to September 30, 2027, with delivery required no later than 120 days after receipt of order on a FOB Destination basis to Gaithersburg, Maryland. Award will be granted to the lowest priced, technically acceptable offeror who meets all minimum technical specifications. Offerors must submit their quotations in three distinct volumes covering technical capability, pricing, and terms and conditions. Following three amendments to the solicitation, the final response deadline is September 9, 2026. The contract incorporates various Federal Acquisition Regulations, including specific deviations for 2026 and requirements for U.S.-made or designated country end products.