CHIPS R&D Custom Diffractometry and Fourier Ptychography Endstation

The U.S. Department of Commerce, National Institute of Standards and Technology (NIST), is soliciting a firm-fixed-price quotation for a custom diffractometry and Fourier ptychography endstation to support EUV HHG source experiments, aimed at demonstrating three-dimensional metrologies for the U.S. semiconductor industry. The endstation includes a custom vacuum chamber with interior dimensions of 40”x40” laterally and 24” in height, capable of achieving a base pressure of 10^-6 Torr, with additional requirements that all components be new, free from gray market parts, and shipped in original manufacturer packaging with full documentation and software. The vacuum chamber must have blank flanges installed for transport to preserve vacuum cleanliness, and the entire system must be delivered FOB Destination to NIST’s facility in Gaithersburg, Maryland. The solicitation, issued as an unrestricted RFQ under NAICS code 334519, mandates a three-volume submission: technical documentation proving compliance with all minimum requirements through detailed citations to the Statement of Work, a separate firm-fixed-price proposal for each CLIN including shipping and tariffs, and a terms and conditions response addressing any objections. Offerors must demonstrate that their equipment is not a prototype, used, refurbished, or experimental item, and failure to meet any minimum requirement renders the quotation unacceptable regardless of price. The contract includes strict deliverables: initial design drawings due two months after award, final design drawings one month after acceptance of the initial design, and the full endstation system delivered within ten months of final design acceptance, with an optional installation and training service to be performed within two weeks of delivery. The total period of performance is thirteen months from award, excluding warranty. Payment is contingent upon government acceptance of delivered items and must be submitted electronically to INVOICE@NIST.GOV with full invoice details including CLIN, unique entity identifier, and cumulative invoicing. Quotations must remain valid for 90 days and require active SAM.gov registration, with noncompliant submissions disqualified. The evaluation process uses a pass/fail gate for technical acceptability, after which award will go to the lowest-priced technically acceptable offeror. Additional requirements include compliance with FAR and agency-specific clauses covering whistleblower rights, subcontractor sales restrictions, security prohibitions, procurement integrity, kickback prevention, and the Prompt Payment Act. Contractors must warrant merchantability and fitness for purpose, are not liable for consequential damages, and remain responsible for latent defects prorated over the equipment