Combined Synopsis/Solicitation for In-Vacuum Extreme-Ultraviolet (EUV) Camera

The National Institute of Standards and Technology (NIST) is seeking a firm-fixed-price quotation for an in-vacuum Extreme-Ultraviolet (EUV) camera system to be used in its Gaithersburg, Maryland campus as part of the SSD’s CHIPS project, aimed at advancing dimensional measurements for future semiconductor transistors by capturing low-noise diffracted intensity patterns. The requirement includes four mandatory line items: an in-vacuum EUV camera with a 2048 x 2048 pixel CCD sensor, a liquid chiller capable of cooling to no higher than -55°C powered by 120 VAC, a 6-inch Conflat (DN100CF) UHV-compatible feedthrough for electrical and cooling connections, and software including a LabVIEW SDK and a Windows generic GUI, with an optional Python SDK. All components must be new, not refurbished or used, certified for ultra-high vacuum operation with a base pressure below 10^-9 Torr, and shipped in original manufacturer packaging with full documentation. Delivery must occur no later than 20 weeks after order receipt at NIST Gaithersburg under F.O.B. Destination terms, with all shipping, handling, and tariff costs included in the quotation. The solicitation explicitly prohibits prototypes, demonstration models, or refurbished equipment, and requires full compliance with UHV standards and compatibility with NIST’s existing vacuum infrastructure. Proposals must be submitted in three distinct volumes: Technical Capability demonstrating how each SOW requirement is met or exceeded with citations and supporting evidence including manufacturer authorization; a separate Firm-Fixed-Price Quotation covering all CLINs and including shipping and tariffs; and a Terms and Conditions volume completing all applicable representations and certifications from Attachment 2, such as SAM registration, Buy American, labor standards, and anti-trafficking provisions. Quoters must maintain an active SAM.gov registration from submission through final payment; inactive registrations will disqualify proposals. Evaluation will prioritize Technical Capability over Price, with award based on best value, allowing selection of a non-lowest-priced or non-highest-tech-rated offeror. Acceptance requires successful installation, performance testing under NIST-controlled conditions using NIST-provided equipment, and verification against specified performance criteria such as low-noise imaging and vacuum compatibility. Payment is due 100% after formal acceptance following successful testing, with no partial invoices permitted. Invoices must be submitted electronically to INVOICE@NIST.GOV with specific required data elements, and are