Nanocalorimetry for Semiconductors and Semiconductor Process Metrology
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The Department of Commerce is seeking technical services to support nanocalorimeter-based semiconductor process metrology specifically for atomic layer deposition. The selected contractor will be responsible for implementing and developing chip-based nanocalorimeter sensors used for ALD process diagnostics. This comprehensive scope of work includes the operation and maintenance of ALD equipment, vacuum systems, and both calorimetric and optical instrumentation. Additional requirements involve managing data collection systems, performing thermal and optical data analysis, and conducting thermochemical modeling and deposited film analysis. The contractor is also expected to prepare technical materials for review and dissemination by NIST. This project is forecasted for performance in Gaithersburg and falls under NAICS code 541690.
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GAITHERSBURG, MD, USASet-Aside
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