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This Government Contract opportunity from Department Of Defense was posted on June 24, 2025. The submission period has ended. Browse the details below for market research, or find similar active opportunities.

Notice of Intent to Sole Source - Deep Reactive Ion Etch (ICP-DRIE) Tool

Closed
N00173-25-SSN-TJ01Federal

Contract Overview

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General Info

NAICS

333242 - Semiconductor Machinery Manufacturing

Place of Performance

DC, USA

Set-Aside

NONE

Documents

1

ICP DRIE Tool Specification (N00173-25-RFQ-TJ01)

PDF, High priority: read this firstspecifications
High

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Timeline

PhaseClosed
Posted

special-notice

Response Deadline

Deadline has passed

Submission Closed

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Organization & Contact Information

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AgencyDepartment Of Defense → Naval Research Laboratory
Contacts1 person available
OfficeWASHINGTON, DC, 20375-5328, USA
Office AddressWASHINGTON, DC, 20375-5328, USA

Full Description

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This Notice of Intent is not a request for competitive proposals. This is not a solicitation or request for offers. No solicitation package is available and telephone requests will not be honored. Only one responsible source and no other supplies or services will satisfy agency requirements. The U.S. Department of Navy, Naval Research Laboratory (NRL) Contracting Division intends to enter into a sole source firm fixed price contract with Oxford Instruments America, Inc. in accordance with FAR 13.501(a) and 41 USC 1901 for the procurement of an Inductively Coupled Plasma - Deep Reactive Ion Etch (ICP - DRIE) tool using fluorine chemistries optimized for Bosch etch from Oxford Instruments. This tool was deemed available from the original source, Oxford Instruments. This notice is being posted to meet the requirements of FAR Subpart 5.2 and DFARS 206.302-1. A solicitation will not be posted; however, any firm that believes it can meet this requirement may give written notification to the Contract Specialist within 15 days of publication of this announcement. Supporting evidence must be in sufficient detail to demonstrate the ability to provide comparable items and developmental experience. All responsible sources may submit a capability statement, proposal, or quotation, which shall be considered. However, a determination by the Government to compete the proposed procurement based on the responses to this notice is solely within the discretion of the Government.

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