Request for Proposal III-V Semiconductor Reactive Ion Beam Etch Reactor (RIBE) with Single Wafer Semi-Automatic Transfer Chamber.

Brookhaven Science Associates, LLC (BSA), under a Prime Contract for the operation of Brookhaven National Laboratory (BNL) with the U.S. Department of Energy (DOE), herewith solicits your proposal to furnish a III-V Semiconductor Reactive Ion Beam Etch Reactor (RIBE). The Center for Functional Nanomaterials (CFN) is a user-oriented research center whose mission is to be an open facility for the nanoscience research community and advance the science of nanomaterials that addresses the nations energy challenge. Research at CFN focuses on the development and application of advanced techniques to understand structure-processing-property relationships in functional nanomaterials. New and unique capabilities would enrich both internal research and our User program. BSA is planning the procurement of a III-V semiconductor reactive ion beam etch reactor (RIBE) with single wafer semi-automatic transfer chamber for the Center for Integrated Nanotechnologies (CINT) at Sandia National Laboratories (SNL). The RIBE system will be procured by Brookhaven Science Associates (BSA) on behalf of the CINT as part of the Nanoscale Science Research Center Recapitalization (NSRC-Recap) project. The RIBE reactor supports microfabrication efforts that require etching of complex submicron-scale structures into many common III-V compound semiconductor materials at high precision. It is considered one of the fundamental tools for the advancement of material science and the development of nanotechnologies. The new system will include a single 100-200mm transfer chamber, a heated reaction chamber that includes a high power inductively coupled plasma unit, a heated/biasing electrode with associated gas delivery, vacuum and cooling systems, optical emissions spectrometry and laser interferometry. BSA invites you to participate in accordance with the RFP letter and all supporting attachments. This requirement has been posted on the sam.gov website under Request for Proposals (RFP) 419164. Any questions concerning this RFP must be addressed via email to the attention of Maile Nichols at contact@example.gov. The purpose of Amendment 1 to RFP 419164 is to provide all offerors with answers to questions received in response to the solicitation. See RFP 419164 Amendment 1 QandA document attached.