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Sources Sought Notice for a Close Fixture for Suss Wafer Bonder

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NIST-SS26-10Federal

Contract Overview

Solicitation details, issuing organization, response deadlines, documents, and interested companies for this government contract opportunity.

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NIST is seeking information from industry to support the future procurement of a universal silicon carbide (SiC) closed fixture for its SUSS Gen2 Wafer Bonder, a specialized tool used in advanced materials research and semiconductor development. The fixture must be capable of supporting a wide range of bonding processes—including thermocompression, eutectic, adhesion, anodic, and fusion bonds—across substrate sizes from 10 mm to at least 150 mm. The central plate must be made of new SiC material, capable of withstanding a 20 kN force while maintaining the flatness required for precise operation, and the entire system, including three clamping arms, must endure operating temperatures up to 550°C, chamber overpressures of at least 2 bar, and vacuum levels as low as 5.0 x 10^-5 mbar. All components must be new, not rebuilt, and the final installation and acceptance testing will occur at NIST’s CNST NanoFab cleanroom in Gaithersburg, Maryland. This sources sought notice is not a solicitation or request for quotation, and no award will result from responses. Interested parties are asked to provide company information, including contact details, SAM.gov UEI, capability statements, and evidence of authorization if acting as a reseller. Respondents are encouraged to identify any requirements that may be unduly restrictive and suggest modifications to foster broader participation, especially from small businesses. They must indicate whether they are small or other-than-small businesses, propose an alternative NAICS code if deemed more appropriate, and disclose any existing federal contracts applicable to the product. NIST will use all submitted information solely for market research to shape a future acquisition and reserves the right to use responses for any purpose. Responses are due by July 7, 2026, and questions must be submitted by July 2, 2026, to be addressed in a public amendment.

General Info

NIST seeks industry input for new SiC fixture for wafer bonder, supporting 10–150 mm substrates, 550°C, 20 kN force, vacuum to 5e-5 mbar.

Agency

Department Of Commerce NistView Agency

NAICS

334516 - Analytical Laboratory Instrument Manufacturing View NAICS

Place of Performance

Gaithersburg, MD, 20899, USA

Set-Aside

NONE

Documents

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No documents available

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Organization & Contact Information

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AgencyDepartment Of Commerce Nist
Contacts1 person available
OfficeGAITHERSBURG, MD, 20899, USA
Organization / Agency
Department Of Commerce Nist
View Agency Profile
Office AddressGAITHERSBURG, MD, 20899, USA
Contacts
Elizabeth Timberlake
contact@example.gov

Full Description

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NIST-SS26-10 


6640 / 334516  


Primary POC: Liz Timberlake (Elizabeth.timberlake@nist.gov)  


Title:  Close Fixture for Suss Wafer Bonder 


BACKGROUND 


***THIS IS A SOURCES SOUGHT NOTICE*** 


National Institute of Standards and Technology (NIST) seeks to acquire a universal SiC closed fixture for SUSS Gen2 Wafer Bonder.  The SUSS wafer bonder provides a unique function of enabling atomic bonding of two substrates by applying high pressure, high heat or high electric current. This specialty tool currently is not able to support most of bonding processes due to the breakage of its original universal SiC closed fixture. It is essential to replace this fixture in order to enable all functions and support various sizes of samples. Wafer bonding has become a popular and important process among photonic device innovation, semiconductor packaging, quantum device research and new material development.  


NIST has a need for a universal SiC closed fixture that meets or exceeds the following draft minimum specifications: 


The Contractor shall provide one (1) universal SiC closed fixture that meet the following minimum specifications: 


All material shall be new; rebuilt system components will not be considered. 


This fixture shall be able to transfer and support bonding process for substrates in various shapes and sizes ranged from 10 mm to at least 150 mm. 


This fixture shall come with proper bonding plates for the following types of bonds: thermocompression, eutectic, adhesion, anodic and fusion bonds.  


The plate at the center of universal closed fixture shall be made of SiC with the flatness level compatible with Suss wafer bonder operation and is able to resist 20 kN force applied by Suss wafer bonder. 


The fixture shall include three clamping arms to secure the positions of 100 mm wafer stack.    


The entire fixture, including clamping arms, shall be able to withstand processing temperature up to 550 ◦C, and chamber overpressure at least 2 bar and vacuum 5.0 x 10E-5 mbar or lower.   


The installation, setup, and acceptance will take place at the NIST CNST NanoFab cleanroom in Gaithersburg, MD. 


HOW TO RESPOND TO THIS NOTICE 


In responding to this notice, please DO NOT PROVIDE PROPRIETARY INFORMATION. Please include only the following information, readable in either Microsoft Word 365, Microsoft Excel 365, or .pdf format, in the response.  Submit the response by email to the Primary Point of Contact and, if specified, to the Secondary Point of Contact listed at the bottom of this notice as soon as possible, and preferably before the closing date and time of this notice. 


  • Provide the complete name of your company, address, name of contact for follow-up questions, their email, their phone number and, if your company has an active registration in https://sam.gov, your company’s Unique Entity ID (UEI). 

  • Details about what your company is capable of providing that meets or exceeds NIST’s minimum requirements. 

  • Whether your company is an authorized reseller of the product or service being cited and evidence of such authorization. 

  • Identify any aspects of the description of the requirements in the BACKGROUND section above that could be viewed as unduly restrictive or create unnecessary barriers that adversely affect your firm’s ability to fully participate in a procurement for such services and explain why.  Please offer suggestions for how the requirements could be organized or structured to encourage the participation of small businesses. 

  • For the NAICS code  

  • Indicate whether your company is (a) a small business or (b) other than small business.  See the Table of Small Business Size Standards and the associated .pdf download file for small business size standards and additional information. 


  • If you believe the NAICS code listed in this notice is not the best NAICS code for the type of product addressed in this notice, identify an alternative NAICS code that you believe would be more appropriate for the planned procurement.  


  • If your firm has existing Federal Supply Schedule contract(s) or other contracts for products or services against which the Department may be able to place orders, identify the contract number(s) and other relevant information. 


  • Describe your firm’s experience (as a prime, subcontractor, or consultant) providing the products or services described in Background section. 

  • Provide any other information that you believe would be valuable for the Government to know as part of its market research for this requirement. 

  • Please let us know if you would like to engage to get a better understanding of the requirement or need additional information about the Government’s requirement for the products or services described in the Background section.  


QUESTIONS REGARDING THIS NOTICE 


Questions regarding this notice may be submitted via email to the Primary Point of Contact and the Secondary Point of Contact listed in this notice. Questions should be submitted so that they are received by 12:00pm Eastern Time on July 2,2026.  Questions will be anonymized and answered via sources sought notice amendment following the question submission deadline. 


IMPORTANT NOTES 


The information received in response to this notice will be reviewed and considered so that the NIST may appropriately solicit for its requirements in the near future.   


This notice should not be construed as a commitment by the NIST to issue a solicitation or ultimately award a contract.   


This notice is not a request for a quotation. Responses will not be considered as proposals or quotations. 


No award will be made as a result of this notice.   


NIST is not responsible for any costs incurred by the respondents to this notice. 


NIST reserves the right to use information provided by respondents for any purpose deemed necessary and appropriate. 


Thank you for taking the time to submit a response to this request. 

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