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Boulder EUV Source Use (Budget Mod Eval)

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Federal

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The Boulder EUV Source Use project, managed by the Department of Commerce Office of the Director, focuses on establishing critical standards for the characterization of extreme ultraviolet light power and energy. Because EUV light is essential for modern semiconductor manufacturing and the fabrication of advanced chips, there is a pressing need for standardized measurement capabilities at industrial conditions. This initiative will enable NIST to collaborate with industry partners to develop tools for both high-power lithography and lower-power support applications, such as reflectivity and transmission measurements. This forecast is categorized under NAICS code 334413 and specifies that the place of performance will be in Boulder, Colorado. The project aims to bridge the current gap in EUV light characterization to support the present and future requirements of the semiconductor industry. Interested parties can coordinate through the designated point of contact, Nathali Medina, via the provided government channels.

General Info

NIST project in Boulder establishing EUV light power and energy standards for semiconductors.

NAICS

334413 - Semiconductor and Related Device Manufacturing

Place of Performance

BOULDER, CO

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NONE

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Organization & Contact Information

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AgencyDepartment Of Commerce → Office of the Director
Contacts1 person available
OfficeN/A
Office AddressN/A
Contacts
NATHALI MEDINA

Full Description

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Extreme ultraviolet (EUV) light is critical technology for modern semiconductor manufacturing, but there are no standards for EUV light characterization, in particular power and energy, at industrial conditions. EUV lithography is required for fabrication of advanced semiconductor chips and requires the generation of 100s of Watts of EUV light. EUV lithography requires support tools, such as reflectivity and transmission measurements, that also require generation of EUV light, but at lower powers and energies. The work in this proposal will empower NIST to work with industry to create relevant power and energy measurement capabilities for the present and future.

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