Electron Beam Lithography (EBL) System Manufacturer
Contract Overview
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AI Contract Overview
This subcontract involves the manufacture and assembly of a complete Electron Beam Lithography (EBL) system for prime contractors supporting projects at the Louisiana Tech University Institute of Micromanufacturing. The scope of work includes the production of a new, non-remanufactured instrument featuring an electron beam source, lithography optics, vacuum systems, and precision stage components, all of which must adhere to the provided bid specifications. The agreement focuses on the delivery of one fully assembled EBL system under NAICS code 334413. The solicitation was posted on September 18, 2026, with a response deadline of October 9, 2026.
General Info
Agency
NAICS
Place of Performance
LA, USASet-Aside
Documents
This scope was carved out of 50012-665-27.
The full solicitation package (1 document), including the RFP, is on the prime solicitation, not on this scope.
Purchase of an Electron Beam Lithography (EBL) System
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