Optical Frequency Comb System (far-IR)

The Department of Commerce, through the Office of the Director, is seeking the development of an Optical Frequency Comb System in the far-IR spectrum to advance trace impurity gas analysis. The primary objective is to create measurement technology, reference data, and materials capable of identifying impurities in process gases at sub-parts-per-billion levels. This initiative aims to support critical tooling breakthroughs, specifically in extreme ultra-violet lithography, by providing the precision necessary for next-generation diagnostics. The project will establish a comprehensive framework for impurity fingerprinting with traceability to new gas primary standards and documentary standards. By developing industry-ready reference materials and point-of-use diagnostics, the effort will enhance overall quality systems. This forecast is associated with NAICS code 334413 and will be performed in Gaithersburg, Maryland.