Optical Frequency Comb System (mid-IR)

The Department of Commerce, through the Office of the Director, is forecasting a project for an Optical Frequency Comb System in the mid-IR spectrum to be performed in Gaithersburg, Maryland. The primary objective is to develop advanced measurement technology, reference data, and materials capable of performing trace impurity gas analysis with precision levels below one part-per-billion. This initiative aims to enable next-generation diagnostics that can reliably identify impurities in process gases, which is critical for enhancing tooling such as extreme ultra-violet lithography. The project will focus on establishing a framework for impurity fingerprinting with traceability to new gas primary standards and documentary standards. By producing metrology-grade data, the effort will support partners in creating industry-ready reference materials and point-of-use diagnostics. This comprehensive approach to quality systems is intended to drive significant breakthroughs in semiconductor manufacturing and related high-precision industrial processes.