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Pre-sharp fabrication

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Federal

Contract Overview

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This forecast from the Department of Commerce Office of the Director focuses on pre-sharp fabrication to enhance Atom Probe Tomography (APT) within the semiconductor industry. While APT allows for the mapping of individual atoms at critical dimensions, its adoption as a formal metrology tool is currently limited by measurement inaccuracies. This project aims to resolve these issues by developing a series of industrially relevant reference materials, data sets, and standard practices to improve the accuracy and repeatability of quantitative measurements. The resulting standards will provide essential benchmarking capabilities for semiconductor manufacturers to ensure consistent quality and precision. The performance of this work is designated for Gaithersburg, Maryland, under NAICS code 334413. Interested parties may coordinate through the point of contact, Nathali Medina, as the agency seeks to advance the technical reliability of APT systems in manufacturing and research environments.

General Info

Commerce project developing APT reference materials and standards for semiconductor industry measurement accuracy.

NAICS

334413 - Semiconductor and Related Device Manufacturing

Place of Performance

GAITHERSBURG, MD

Set-Aside

NONE

Documents

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Timeline

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Organization & Contact Information

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AgencyDepartment Of Commerce → Office of the Director
Contacts1 person available
OfficeN/A
Office AddressN/A
Contacts
NATHALI MEDINA

Full Description

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Atom Probe Tomography (APT) is a powerful tool for the semiconductor industry, offering the unique ability to identify and map the chemical identity and location of individual atoms with spatial resolution at or below the smallest critical dimensions found in modern devices. These capabilities have led most major semiconductor manufacturers to install APT systems at their manufacturing facilities and/or R&D labs. Significant advances in the technique have been made in recent years, however, industry adoption as a true metrology tool is still held back by measurement inaccuracies that may be overcome by using standards. This project will produce a series of industrially relevant reference materials, data sets, and standard practices that will improve the accuracy and repeatability of quantitative measurements made by APT. These standards will also serve as critical benchmarking standards going forward, allowing semiconductor manufacture

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