Raith EBPG 5200 Plus Service Contract

EBL is an essential tool for prototyping advanced quantum devices and measurement standards. This technology is also critical for the fabrication of diverse nanoscale devices within the CHIPS program. The 2 sophisticated electron beam lithography (EBL) systems require a service contract and can only be serviced by the original equipment manufacturer due to the specialized expertise required to attain proper maintenance and of 2 EBL systems. The EBL facilitates repeatable lithographic processing of semiconductor substrates that's required for manufacturing and reliable production of nanoscale semiconductor devices in the arena of quantum measurement sciences and measurement standards. Also, in support of the CHIPS Act, the EBL systems will address the major metrology R&D grand challenges for the reliable production of next generation microelectronic devices. These capabilities are accessible within the CNST NanoFab as a shared resource f