This Solicitation opportunity from Department Of Commerce was posted on August 31, 2026. The submission period has ended. Browse the details below for market research, or find similar active opportunities.
Semiconductor Process Residual Gas Analyzer
Contract Overview
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Solicitation 1333ND26Q रोमा640573 is a Request for Quotation issued by the National Institute of Standards and Technology for the procurement of a new, semiconductor-grade Process Residual Gas Analyzer. The equipment will be utilized by the Chemical Process and Nuclear Measurements Group for a CHIPS R&D Metrology program focused on developing digital twin technology for semiconductor manufacturing. The system must be compatible with low-volatility organometallic and metal halide precursors and process gases, featuring an Ethernet connection, external digital inputs for triggering, and automated calibration for pressure, electron multiplier, and sensitivity. This is a full and open competition under NAICS code 334516, with a specific set-aside eligibility for Women-Owned Small Businesses. The government intends to award a single firm-fixed-price purchase order based on the lowest priced technically acceptable quotation. Technical acceptability requires the provision of a new instrument that meets all specified requirements, as used or remanufactured equipment and prototypes are prohibited. The successful contractor must deliver the equipment and software manual to Gaithersburg, Maryland, within 16 weeks of the award on an FOB Destination basis. Quotations must be submitted via email to the contract specialist by September 14, 2026, and require an active System for Award Management registration and Unique Entity Identifier.
General Info
Place of Performance
Gaithersburg, MD, 20899, USASet-Aside
Timeline
Submission Closed
Organization & Contact Information
Full Description
SOLICITATION 1333ND26QNB640573
Semiconductor Process Residual Gas Analyzer
This is a solicitation for commercial items prepared in accordance with the format in RFO Subpart 12.2, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; quotations are being requested, and a separate written document will not be issued.
This solicitation is a Request for Quotation (RFQ).
The associated North American Industrial Classification System (NAICS) code for this procurement is 334516 – Analytical Laboratory Instrument Manufacturing with a Small Business size standard of 1,000 Employees. This requirement will be a Full and Open Competition.
The Chemical Process and Nuclear Measurements Group is seeking a semiconductor-grade Process Residual Gas Analyzer (RGA) for use on flow systems, including an ALD reactor, as part of a CHIPS R&D Metrology program. This program focuses on developing digital twin technology for semiconductor manufacturing equipment. The flow systems, equipped with in situ and inline sensors, are used to acquire process data on thin film growth characterization. The RGA will serve as an online process diagnostic. The RGA must be compatible with low-volatility organometallic and metal halide precursors and process gases. The data and models generated by this project will lead to improvements in process optimization and control, ultimately resulting in cost savings for the US semiconductor industry.
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