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Semiconductor Process Residual Gas Analyzer (RGA) Manufacturer/Supplier

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Federal

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This subcontract opportunity with the Department of Commerce NIST seeks a manufacturer or supplier to provide a new semiconductor-grade Process Residual Gas Analyzer and accompanying software manuals. The instrument must be compatible with process gases, metal halide precursors, and low-volatility organometallic compounds to serve as an online process diagnostic for thin film growth characterization. Eligible bidders must demonstrate documented technical capability and maintain an active SAM registration. The project is located in Gaithersburg, Maryland, with a response deadline of September 14, 2026. The final delivery consists of one complete RGA unit and its associated software documentation.

General Info

NIST seeks a semiconductor-grade Process Residual Gas Analyzer and software by September 14, 2026.

Agency

Department Of Commerce NistView Agency

NAICS

334516 - Analytical Laboratory Instrument ManufacturingView NAICS

Place of Performance

Gaithersburg, MD, 20899, USA

Set-Aside

NONE

Documents

This scope was carved out of 1333ND26QNB640573.

The full solicitation package (1 document), including the RFP, is on the prime solicitation, not on this scope.

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Semiconductor Process Residual Gas Analyzer

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Organization & Contact Information

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AgencyDepartment Of Commerce Nist
ContactsNo contacts available
OfficeN/A
Organization / Agency
Department Of Commerce Nist
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Office AddressN/A
ContactsNo contact information available

Full Description

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Supplies a new semiconductor-grade Process Residual Gas Analyzer (RGA) for prime contractors on NIST facility projects. Provides a new instrument compatible with low-volatility organometallic and metal halide precursors and process gases for use as an online process diagnostic for thin film growth characterization. Includes associated software manuals. Requires documented technical capability and active SAM registration. Delivers one complete RGA and software manual.

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