Semiconductor Process Residual Gas Analyzer (RGA) Manufacturer/Supplier
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This subcontract opportunity with the Department of Commerce NIST seeks a manufacturer or supplier to provide a new semiconductor-grade Process Residual Gas Analyzer and accompanying software manuals. The instrument must be compatible with process gases, metal halide precursors, and low-volatility organometallic compounds to serve as an online process diagnostic for thin film growth characterization. Eligible bidders must demonstrate documented technical capability and maintain an active SAM registration. The project is located in Gaithersburg, Maryland, with a response deadline of September 14, 2026. The final delivery consists of one complete RGA unit and its associated software documentation.
General Info
Agency
NAICS
Place of Performance
Gaithersburg, MD, 20899, USASet-Aside
Documents
This scope was carved out of 1333ND26QNB640573.
The full solicitation package (1 document), including the RFP, is on the prime solicitation, not on this scope.
Semiconductor Process Residual Gas Analyzer
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