Semitool 870S Spin Rinse Dryers

This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; proposals are being requested and a written solicitation will not be issued. This solicitation, NB686020-15-04313, is issued as a request for quotation (RFQ). All communications and documents must include the solicitation #NB686020-15-04313. This solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular 2005-83. The associated North American Industrial Classification System (NAICS) code for this procurement is 333242 with a small business size standard of 500 employees. This is a Brand Name, total small business set-aside. It is being issued using the simplified acquisition procedures under the authority of FAR 13.5 Certain Commercial Items. This combined synopsis/solicitation is for the following Brand Name commercial item(s): CLIN 0001: Three (3) refurbished Semitool 870S Spin Rinser Dryers, with rotors: Two (2) compatible rotors for 3" (75mm) SEMI spec wafers One (1) compatible rotors for 4" (100 mm) SEMI spec wafers Two (2) compatible rotors for 6" (150 mm) SEMI spec wafers Description of requirements for the items to be acquired: The Boulder Micro-fabrication Facility (BMF) at the National Institute of Standards and Technology, processed approximately 1000 photomasks and thousands of silicon wafers per year in the course of fabricating integrated circuit devices supporting all divisions represented in Boulder. Many of the fabrication steps for both photomasks and wafers involve a final water rinse step. After water rinse, the photomasks and wafers are loaded into Spin Rinser Dryer(SRD) tools which spin a cassette load of photomasks or wafers in Ultra Pure Water and then heated dry nitrogen. This process takes place automatically in specially designed chambers and cassettes to ensure that the wafers are not damaged and are completely dry without contamination. The Contractor shall provide a total of three (3) Spin Rinser Dryers that meet the following minimum technical requirements. The Contractor shall deliver the systems, as described below: TECHNICAL SPECIFICATIONS: 1. We require three (3) Semitool 870S Spin Rinser Dryers, Refurbished, or equivalent. TECHNICAL SPECIFICATIONS: - Dual Stack front loading (2 SRD chambers) - Up to 6" (150 mm) wafer capable) - Controllers (one for each SRD chamber with at least one drying recipe with programmable step duration and RPM) - EMO Emergency Machine Off button - Single bolt rotor design - 110 volt electrical system - DI water recirculation (WR-20) - Installation and operation manuals and documentation - Refurbished to factory specifications (see below for required refurbishment) - Rotor # 1: 3" diameter wafers - Rotor #2: 6" diameter wafers - Option: Rotor 4" wafers Refurbishment Specifications - Replace with NEW parts: 1..1 ALL solenoid valves 1..2 Gaskets and o-rings: door seal, nitrogen manifold, rear bowl seal, DI water manifold 1..3 ALL filters 1..4 Vibration dampers 1..5 Teflon DI and N2 lines 1..6 DI nozzles - Electropolish: Spin dryer bowl, nitrogen manifold, mounting brackets, labyrinth seal assembly - Inspect, test and replace if necessary: 1..1 Rotor stop positioner 1..2 Start/Stop switches 1..3 Blanket heaters 1..4 N2 pressure sensors 3.4 Replace as necessary all machine covers to like new condition The required delivery is 8-10 weeks After Receipt of Order (ARO). FOB Destination for delivery is NIST, 325 Broadway, Boulder, CO 80305. Delivery point of contact will be provided upon award. Please note shipping information will be provided by NIST at time of Award. INSPECTION AND ACCEPTANCE: Conformity to the above specifications. BASIS OF AWARD: Award shall be made to the lowest priced, technically acceptable offeror. This will be a firm fixed price purchase order to the responsible contractor submitting a quote that meets all of the requirements of this RFQ and who has the lowest price. TECHNICAL CAPABILITY: Evaluation of Technical Capability will be based on the information provided in the quotation. Documentation submitted in the quotation shall be evaluated to determine that the proposed equipment meets or exceeds the Governments minimum required specifications. Failure to clearly and unambiguously demonstrate this will result in an "unacceptable" technical rating. PRICE: Price shall be evaluated for reasonableness. FAR 52.212-2, Evaluation - Commercial Items, applies to this acquisition. The Government will award a fixed price contract to the Lowest Price Technically Acceptable (LPTA) quote, based upon the technical specifications as detailed within the attached statement of work. FAR 52.212-3, Offeror Representations and Certifications -- Commercial Items. The quoter must have completed the Online Representations and Certifications Application (ORCA), which must be uploaded to the System for Award Management (SAM) at www.sam.gov. FAR 52.212-4, Contract Terms and Conditions -- Commercial Items, applies to this acquisition. FAR 52.212-5, Contract Terms and Conditions Required To Implement Statutes or Executive Orders -- Commercial Items applies to this acquisition. Additional FAR 52.212-5 clauses cited in the clause applicable to this acquisition are: 52.204-10, Reporting Executive compensation and First-Tier Subcontract Awards 52.209-6, Protecting the Government's Interest When Subcontracting Debarred, Suspended, or Proposed for Debarment 52.219-6, Notice of Total Small Business Aside 52.219-13, Notice of Set-Aside of Orders 52.219-28, Post Award Small Business Program Representation 52.222-3, Convict Labor 52.222-19, Child Labor - Cooperation With Authorities And Remedies 52.222-21, Prohibition of Segregated Facilities 52.222-26, Equal Opportunity 52.222-36, Equal Opportunity for Workers with Disabilities 52.222-50, Combating Trafficking in Persons 52.223-18, Contractor Policy to Ban Text Messaging While Driving 52.225-3, Buy American Act-Free trade Agreements-Israeli trade Act w/Alternate 1 52.225-13, Restrictions on Certain Foreign Purchases 52.232-33, Payment by Electronic Funds Transfer FAR 52.252-1, Solicitation Provisions Incorporated by Reference: This solicitation incorporates one or more solicitation provisions by reference, with the same force and effect as if they were given in full text. Upon request, the Contracting Officer will make their full text available. The quoter is cautioned that the listed provisions may include blocks that must be completed by the quoter and submitted with its quotation or offer. In lieu of submitting the full text of those provisions, the quoter may identify the provision by paragraph identifier and provide the appropriate information with its quotation or offer. Also, the full text of a solicitation provision may be accessed electronically at this/these address(es): at http://acquisition.gov/comp/far/index.html and http://www.osec.doc.gov/oam/acquistion_management/policy/default.htm FAR 52.225-18 - Place of Manufacture. FAR 52.232-15, Progress Payments Not Included. CAR 1352.213-70, Evaluation Utilizing Simplified Acquisition Procedures CAR 1352.233-70, Agency Protests CAR 1352.233-71, GAO and Court of Federal Claims Protests FAR 52.252-2, Clauses Incorporated by Reference: This contract incorporates one or more clauses by reference, with the same force and effect as if they were given in full text. Upon request, the Contracting Officer will make their full text available. Also, the full text of a clause may be accessed electronically at this/these address(es): http://acquisition.gov/comp/far/index.html and http://www.osec.doc.gov/oam/acquistion_management/policy/default.htm FAR 52.232-40, Providing Accelerated Payments to Small Business Subcontractors. FAR 52.247-34, FOB Destination CAR 1352.201-70, Contracting Officer's Authority CAR 1352.209-73, Compliance with the Laws CAR 1352.209-74, Organizational Conflict of Interest CAR 1352.246-70, Place of Acceptance (APR 2010) (a) The Contracting Officer or the duly authorized representative will accept supplies and services to be provided under this contract. (b) The place of acceptance will be: NIST Shipping and Receiving 325 Broadway Boulder, CO 80305 NIST LOCAL-04 BILLING INSTRUCTIONS (a) NIST prefers electronic Invoice/Voucher submissions and they should be emailed to contact@example.gov. (b) Each Invoice or Voucher submitted shall include the following: (1) Contract Number. (2) Contractor Name and Address. (3) Date of Invoice. (4) Invoice Number. (5) Amount of Invoice and Cumulative Amount Invoiced to-date. (6) Contract Line Item Number (CLIN). (7) Description, Quantity, Unit of Measure, Unit Price, and Extended Price of Supplies/Services Delivered. (8) Prompt Payment Discount Terms, if Offered. (9) Any other information or documentation required by the contract. (c) In the event electronic submissions are not used, The Contractor shall submit an original invoice or voucher in accordance with the payment provisions of this contract to: NIST Accounts Payable Office 100 Bureau Drive, Mail Stop 1621 Gaithersburg, MD 20899-1621 NIST LOCAL - 39, NIST LOCAL-39 MARKING/PACKING INSTRUCTIONS (1) If the total contract/order includes multiple quantities of the same or like item(s), segregated as separate CLIN/Item numbers, deliverables shall be packed accordingly. Each individual Package / container in the shipment shall include deliverables on a per-CLIN or Item basis. (2) For each shipment made under this contract/order, the Contractor shall furnish itemized packing list(s), enumerating the specific contents of each shipping container and what specific individual components constitute a full and complete "unit" for each bid item. The packing list shall include the brief description of each item found in the Schedule. If more than one container is required for each unit, each container should be marked accordingly, e.g., "Box 1 of 2," "Box 2 of 2," and the boxes, where feasible, should be taped or shrink-wrapped together as an issuable unit. (3) The contract number AND CONTRACT LINE ITEM NUMBER (CLIN) OR ORDER ITEM NUMBER shall be placed on the exterior of all containers. If you have any questions please do not hesitate to contact me at contact@example.gov. Thank you. The Contractor shall submit a Quote, to be received no later than 4 p.m. Mountain Time, Wednesday, September 16, 2015, and must include the following: Company name, address phone numbers, DUNS number, itemized quote including all minimum specifications. Quotes shall be delivered via email to contact@example.gov. Please direct any questions regarding this solicitation to Susan McKean at contact@example.gov no later than 2:00 p.m. Mountain Time, Tuesday, September 15, 2015.