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vector signal generator/arbitrary waveform

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Federal

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This forecast from the Department of Commerce Office of the Director focuses on the procurement of vector signal generators and arbitrary waveform equipment to enhance plasma etching within semiconductor manufacturing. The project aims to address the nonlinear complexities of RF waveforms and plasma chemistry by developing advanced RF waveform metrology and microsecond time-resolved frequency comb diagnostics. These tools are intended to improve RF calibration, enable in-situ monitoring, and provide real-time data to optimize the design of next-generation etching processes. The work will be performed in Boulder, Colorado, under NAICS code 334413. Interested parties can coordinate through the designated point of contact, Nathali Medina, to support the goal of better correlating reactor inputs with etching outcomes and ensuring consistency across manufacturing tools.

General Info

Commerce procurement of RF waveform equipment for semiconductor plasma etching in Boulder, Colorado.

NAICS

334413 - Semiconductor and Related Device Manufacturing

Place of Performance

BOULDER, CO

Set-Aside

NONE

Documents

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Organization & Contact Information

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AgencyDepartment Of Commerce → Office of the Director
Contacts1 person available
OfficeN/A
Office AddressN/A
Contacts
NATHALI MEDINA

Full Description

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Plasma etching—performed across the semiconductor manufacturing ecosystem—is a highly nonlinear process involving arbitrary radiofrequency (RF) waveforms, dynamic electrical properties, and complex chemistry in a confined non-equilibrium environment. Metrology tools are needed to better correlate reactor inputs with etching outcomes, and to precisely evaluate consistency across plasma etching tools. To do so, we will develop RF waveform metrology and µs time-resolved frequency comb diagnostics to meet industry needs including reliable RF calibration, in-situ monitoring of plasma chemistry, and real-time data generation for intelligent design of next-generation plasma etching processes.

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