Nanocalorimetry for Semiconductors and Semiconductor Process Metrology
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The Department of Commerce, through the AD for Laboratory Programs, is seeking technical services to support nanocalorimeter-based semiconductor process metrology specifically for atomic layer deposition. The selected contractor will be responsible for implementing and developing chip-based nanocalorimeter sensors for process diagnostics. This scope of work includes the operation and maintenance of ALD equipment and vacuum systems, as well as the management of calorimetric and optical instrumentation, data collection, thermal and optical analysis, and thermochemical modeling. Additionally, the contractor will perform deposited film analysis and prepare technical materials for review and dissemination by NIST. This opportunity is listed as a forecast and is designated as a total small business set-aside under NAICS code 541690. The work is to be performed in Gaithersburg, Maryland. Interested parties may coordinate through the point of contact, William Clark.
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GAITHERSBURG, MDSet-Aside
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