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Nanocalorimetry for Semiconductors and Semiconductor Process Metrology

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Federal

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The Department of Commerce, through the AD for Laboratory Programs, is seeking technical services to support nanocalorimeter-based semiconductor process metrology specifically for atomic layer deposition. The selected contractor will be responsible for implementing and developing chip-based nanocalorimeter sensors for process diagnostics. This scope of work includes the operation and maintenance of ALD equipment and vacuum systems, as well as the management of calorimetric and optical instrumentation, data collection, thermal and optical analysis, and thermochemical modeling. Additionally, the contractor will perform deposited film analysis and prepare technical materials for review and dissemination by NIST. This opportunity is listed as a forecast and is designated as a total small business set-aside under NAICS code 541690. The work is to be performed in Gaithersburg, Maryland. Interested parties may coordinate through the point of contact, William Clark.

General Info

Technical services for nanocalorimeter semiconductor process metrology and ALD support in Gaithersburg, Maryland.

NAICS

541690 - Other Scientific and Technical Consulting Services

Place of Performance

GAITHERSBURG, MD

Set-Aside

SBA

Documents

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Timeline

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forecast

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Organization & Contact Information

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AgencyDepartment Of Commerce → AD for Laboratory Programs
Contacts1 person available
OfficeN/A
Office AddressN/A
Contacts
William Clark

Full Description

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Obtain technical services to support nanocalorimeter-based semiconductor process metrology for atomic layer deposition (ALD). The Contractor shall implement and develop chip-based nanocalorimeter sensors for ALD process diagnostics, including operation and maintenance of ALD equipment, vacuum systems, calorimetric and optical instrumentation, data collection systems, thermal and optical data analysis, thermochemical modeling, deposited film analysis, and preparation of technical materials for NIST review and dissemination.

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