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PLASMA PRO 100

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FA860126Q0075Federal

Contract Overview

Solicitation details, issuing organization, response deadlines, documents, and interested companies for this government contract opportunity.

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The Department of the Air Force, through the Air Force Life Cycle Management Center at Wright-Patterson Air Force Base, Ohio, is conducting a sources sought to identify qualified vendors for the purchase, installation, setup, testing, and training of one Oxford PlasmaPro 100 Reactive Ion Etch (RIE) system. This includes all necessary support equipment such as chillers, vacuum systems, gas delivery components, and associated hardware. The system is intended for use in the Engineering Laboratory at the Air Force Institute of Technology, with a performance period of 120 days post-award. The acquisition is anticipated to exceed the Simplified Acquisition Threshold, and the agency seeks feedback on potential suppliers’ capabilities, business size classification, socio-economic status, and past performance related to similar complex projects. Interested parties are requested to submit a capabilities statement addressing specific details including company information, points of contact, ownership status, manufacturer or distributor role, proprietary data policies, system viability, recent commercial sales, and compliance with the potential small business subcontracting requirements. While no set-aside has been designated, the Air Force is considering a small business set-aside contingent on market interest and capability. Responses are due by July 2, 2026, and must be submitted via email to the designated contracting officers. This sources sought announcement is for market research only and does not constitute a solicitation or binding offer.

General Info

Air Force seeks vendors for Oxford PlasmaPro 100 RIE system; responses due July 2, 2026.

Agency

Department Of Defense → FA8601 Aflcmc Pzio

NAICS

811310 - Commercial and Industrial Machinery and Equipment (except Automotive and Electronic) Repair and Maintenance View NAICS

Place of Performance

Wright Patterson AFB, OH, 45433, USA

Set-Aside

NONE

Documents

(2)

SOW for Oxford Plasma Pro 100 Installation and Maintenance at Wright-Patterson AFB

PDFsow

Instructions to Offerors for Oxford Plasma Pro 100 Sources Sought

PDFsources-sought

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Timeline

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Organization & Contact Information

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AgencyDepartment Of Defense → FA8601 Aflcmc Pzio
Contacts2 people available
OfficeWRIGHT PATTERSON AFB, OH, 45433-5344, USA
Organization / Agency
Department Of Defense → FA8601 Aflcmc Pzio
Office AddressWRIGHT PATTERSON AFB, OH, 45433-5344, USA
Contacts

Full Description

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SOURCES SOUGHT SYNOPSIS


Title: Purchase, Installation, and Training for a PlasmaPro 100 Reactive Ion Etch (RIE) System


Agency: Department of the Air Force, Air Force Materiel Command, Air Force Life Cycle Management Center (AFLCMC)


Location: Wright-Patterson AFB, OH


Classification Code: J066 - Maintenance, Repair and Rebuilding of Equipment-Instruments and Laboratory Equipment


NAICS Code: 811310 - Commercial and Industrial and Machinery and Equipment


This is a Sources Sought Synopsis announcement only. This is not a solicitation for proposals, proposal abstracts, or quotations. The purpose of this synopsis is to gain knowledge of potential qualified sources and their size classification (Small Business, HUBZone, 8(a), Service-Disabled Veteran-Owned Small Business, Women-Owned Small Business, etc.) relative to NAICS code 811310.


The Government is seeking to identify responsible and eligible vendors who can provide all personnel, equipment, tools, parts, and supervision necessary to perform installation, setup, testing, and training for one Oxford Plasma Pro 100 RIE system, along with all required support equipment (chillers, vacuum systems, etc.). The equipment will be located in the Engineering Laboratory at the Air Force Institute of Technology (AFIT), Wright-Patterson AFB, OH. The period of performance is 120 days after contract award. This requirement is anticipated to be above the Simplified Acquisition Threshold (SAT).


The full list of required components is detailed in the attached Statement of Work. Key components include, but are not limited to:


  • PlasmaPro 100 ICP Etch system with a 208V 60Hz 3-phase supply.
  • Cobra300 3kW ICP plasma etch source.
  • Cryo-cooled/electrically-heated etch lower electrode kit.
  • Complete gas delivery system including standard and by-passed gaslines, MFCs, and a split gas manifold.
  • Associated vacuum pumps, chillers, and control hardware (PC, monitor, etc.).

INSTRUCTIONS FOR RESPONSE:


Interested parties are requested to submit a capabilities statement that shall include the following information:


  1. Company Information: Company name, physical mailing address, and CAGE CODE and Unique Entity ID (UEI).
  2. Point of Contact: Name, phone number, and email address of a designated point of contact.
  3. Company business size status under a relevant NAICS code. Prospective contractors must be registered in the System for Award Management (SAM) database at https://www.sam.gov to be eligible for a Department of Defense contract award
  4. Ownership: A statement as to whether your company is domestically or foreign-owned or controlled (if foreign, please indicate the country), and whether use of any foreign national employees is contemplated on this effort.
  5. Socio-Economic Status: Statement of socio-economic status (e.g., Large Business, Small Business, 8(a), HUBZone, Service-Disabled Veteran-Owned Small Business, etc.).
  6. Manufacturer/Distributor Status: Indicate if you are the manufacturer of the system or a distributor. If a distributor, provide the name of the manufacturer.
  7. Proprietary Data: A statement confirming whether the respondent will allow the Government to release any proprietary data submitted. The Air Force will handle proprietary items in accordance with FAR 2.101 and 3.104.
  8. Past Performance: Describe your company's past experience on previous projects of similar complexity to this requirement. Include contract numbers, project descriptions, agency/organization supported, and a point of contact for each reference.
  9. Capabilities: Briefly describe the capabilities of your facility and the nature of the services/supplies you provide.
  10. System Viability: Identify any specific requirements in the provided documentation that would currently preclude your product/service from being a viable solution.
  11. Commerciality: Provide recent sales history to commercial companies to help determine commerciality. State if the product/service is offered to both U.S. Government and commercial sources under similar terms and conditions, and briefly describe any differences.

Attention Small Business Respondents: The acquisition strategy for this requirement has not been decided. The Air Force is contemplating a small business set-aside if there is sufficient demonstrated interest and capability. Note that a key factor is that two or more small business prime contractors must be capable of performing at least 50% of the cost of the contract for personnel with their own employees, as defined in FAR clause 52.219-14, Limitations on Subcontracting. If you are a small business, please provide specific details and rationale as to how you would comply with this clause.


Attention All Potential Respondents: If this acquisition is not set aside for small business, it may include a small business utilization requirement. Please provide feedback on what areas of this requirement are likely candidates for small business subcontracting.


CLOSING: Responses to this Sources Sought notice must be submitted via email no later than July 2, 2026, at 11:00am Eastern Time. All correspondence sent via email must contain the subject line: “FA860126Q0075, Sources Sought: Plasma Pro 100.”


Be advised that due to network filters, attachments ending in .zip or .exe are not allowable and will be deleted. The points of contact for this action are Brian Algeo, Contract Specialist, at brian.algeo.1@us.af.mil, and Candice Snow, Contracting Officer, at candice.snow@us.af.mil.


This is a Sources Sought notice for market research purposes only. In accordance with Revolutionary FAR Overall (RFO) 15.201, responses to this notice are not considered offers and cannot be accepted by the Government to form a binding contract. Any information submitted by respondents to this notice is strictly voluntary and will not be reimbursed by the Government. The Government’s assessment of the capability statements received will factor into whether any forthcoming solicitation will be conducted as a full and open competition or as a set-aside.


Please submit your responses via email to the contracting office points of contact: Ms. Candice L. Snow (candice.snow@us.af.mil) and Mr. Brian Algeo (brian.algeo.1@us.af.mil)


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