Solicitation for Gas Abatement System

The National Institute of Standards and Technology (NIST) is soliciting firm-fixed-price quotations for a gas abatement system to be installed at its Gaithersburg, Maryland campus. The system will support the Materials Measurement Laboratory by safely abating hazardous exhaust from plasma etch processes used in semiconductor device fabrication. The required equipment must feature a dry bed absorber/scrubber in an enclosed cabinet with control readouts and an endpoint detector. Technical specifications require the system to abate a specific gas matrix, including various fluorinated gases and noble gases, while ensuring hazardous gas concentrations at the outlet remain within threshold limit values and flammable gases stay below the lower explosive limit. The absorber canister must have a minimum lifetime of one year based on specified flow rates and process hours. This acquisition is a 100 percent small business set-aside under NAICS code 333242. Award will be made to the lowest priced, technically acceptable quoter, with technical capability rated as either acceptable or unacceptable based on whether the proposed equipment meets or exceeds all minimum requirements. The contractor is responsible for delivery F.O.B. Destination to the Gaithersburg site, providing a one-year warranty, and conducting on-site training. Quotations must be submitted in three distinct volumes, including a detailed technical approach with citations to the statement of work. Following two amendments, the final response deadline is September 15, 2026, at 10:00 am EST. Payment will be processed electronically through the Invoice Processing Platform System.