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This Solicitation opportunity from Department Of Energy was posted on August 8, 2025. The submission period has ended. Browse the details below for market research, or find similar active opportunities.

Wafer Spinner - SEE DESCRIPTION (G5-213047.1)

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5-B193-Q-00686-00Federal

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Argonne National Laboratory is seeking to procure a wafer spinner capable of spinning photoresist and other polymers, with specific features including a splash ring, adjustable speeds from 50 to 99 rpm and 100 to 8000 rpm, and a 150mm round bowl. The spinner must include a safety glass bowl cover, a removable polypropylene process bowl, a digital vacuum gauge with vacuum monitoring, and an interlock system for cover safety. It should operate on 115VAC, 60/50Hz single-phase power, with an acceleration rate of 4000 rpm/sec, and support spinning durations from 1 to 999 seconds. The device should accommodate up to 200 recipes with 40 steps each, and include accessories such as a waste bottle, exhaust connection, and a directly-coupled hollow shaft motor with a transparent liquid separator on the vacuum line. Spin chucks for various sizes (150mm, 100mm, 3", 2") with centering rings and vacuum areas are required, along with spare bowls and waste bottles, and options for future upgrades like dispense and edge bead functionalities. The solicitation emphasizes the importance of completing all required forms, particularly points A-F on page 3 of the ANL-70 form, by the deadline of August 13, 2025, at 12 PM CST, to be considered for award. The contract is managed by Argonne National Laboratory, a DOE contractor located in Lemont, Illinois, with the primary point of contact being Annette Wegrzyn.

General Info

Argonne National Lab seeks 150mm wafer spinner, precise control, safety features, recipe storage, deadline August 13, 2025.

NAICS

333242 - Semiconductor Machinery Manufacturing

Place of Performance

Lemont, IL, 60439, USA

Set-Aside

NONE

Documents

1

RFQ 5-B193-Q-00686-00 - Wafer Spinner

DOC, High priority: read this firstrfq
High

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PhaseClosed
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Solicitation

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Organization & Contact Information

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AgencyDepartment Of Energy → Argonne National Labor - DOE Contractor
Contacts1 person available
OfficeLemont, IL, 60439, USA
Office AddressLemont, IL, 60439, USA

Full Description

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Argonne National Laboratory is seeking to source: 1qty Wafer spinner that can spin photoresist and other polymers - splash ring - speed 50-99rpm, 100-8000rom (+/- 1 rpm) with 150mm round - Bowl Cover made of safety glass - Process bowl of polypropylene (removable) - d- igital vacuum gauge - vacuum monitoring - cover open interlock - 115VAC 60/50hz 5/3 single phase - Acceleration 4000 rpm/sec - spinning time 1s-999s - 200 recipes with 40 steps each - waste bottle (0.5l in front of spinner) - Exhaust connection PG11 tube - Dimension: (wxdxh) cannot exceed (350x446x430mm) - directly-coupled hollow shaft motor with a transparent liquid separator on the vacuum line - spin chucks for : 150mm, 100mm, 3", 2" - with centering rings - piece chuck with 3mm diameter vacuum area - spare bowl - spare waste bottle - options for future dispense and edge bead upgrades Please see attached solicitation package - on the ANL-70 form: Please remember to complete points A-F on page 3. NO SOLICITATION WILL BE CONSIDERED WITHOUT ALL THESE COMPLETED. If any components are missing, your solicitation will be discarded. All forms and signed solicitation have a requested completion date of 8/13/25 at 12PM CST. If there are any questions please feel free to reach out to contact@example.gov.

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POSTED

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POSTED

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