CFI: Atomic Layer Etcher (ALE) System

The University of Waterloo, acting on behalf of the Government of Canada, is soliciting bids for an Atomic Layer Etcher (ALE) system to support advanced fabrication of quantum devices through precise etching of thin dielectric, metallic, and superconducting layers. This equipment will be integrated into the Quantum-Nano Fabrication and Characterization Facility, a core scientific platform enabling cutting-edge research in materials science, nanotechnology, and quantum information processing. The system must meet stringent performance requirements to ensure sub-nanometer control and compatibility with a broad range of quantum material platforms. The solicitation, identified as 2026-RFPN-00502 CH, was posted on May 21, 2026, with a deadline for responses on June 15, 2026, at 7:30 PM. Interested parties must access bidding documents through Merx.com, where fees may apply, and details on pricing can be found on their public website. The primary point of contact for inquiries is Reception Services at the University of Waterloo, reachable via email at procure@uwaterloo.ca or by phone at 519-888-4501. The contract falls under federal procurement guidelines, with performance expected at the University of Waterloo’s facility in Waterloo, Ontario.