This Solicitation opportunity from Government of Canada was posted on May 21, 2026. The submission period has ended. Browse the details below for market research, or find similar active opportunities.

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CFI: Atomic Layer Etcher (ALE) System

Closed

2026-RFPN-00502 CHInternational

Submission Closed06/15/2026, 07:30:00 PM UTC

Contract Overview

Solicitation details, issuing organization, response deadlines, documents, and interested companies for this government contract opportunity.

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NAICS: 333242

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AI Contract Overview

The University of Waterloo, acting on behalf of the Government of Canada, is soliciting bids for an Atomic Layer Etcher (ALE) system to support advanced fabrication of quantum devices through precise etching of thin dielectric, metallic, and superconducting layers. This equipment will be integrated into the Quantum-Nano Fabrication and Characterization Facility, a core scientific platform enabling cutting-edge research in materials science, nanotechnology, and quantum information processing. The system must meet stringent performance requirements to ensure sub-nanometer control and compatibility with a broad range of quantum material platforms. The solicitation, identified as 2026-RFPN-00502 CH, was posted on May 21, 2026, with a deadline for responses on June 15, 2026, at 7:30 PM. Interested parties must access bidding documents through Merx.com, where fees may apply, and details on pricing can be found on their public website. The primary point of contact for inquiries is Reception Services at the University of Waterloo, reachable via email at procure@uwaterloo.ca or by phone at 519-888-4501. The contract falls under federal procurement guidelines, with performance expected at the University of Waterloo’s facility in Waterloo, Ontario.

General Info

University of Waterloo seeks Atomic Layer Etcher for quantum device fabrication under federal procurement, deadline June 15, 2026.

Agency

Government of Canada → University of Waterloo

NAICS

333242 - Semiconductor Machinery ManufacturingView NAICS

Place of Performance

CAN

Set-Aside

NONE

Documents

(0)

No documents available

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Timeline

PhaseClosed

PostedMay 21

Solicitation

Response DeadlineJun 15

Deadline has passed

Submission Closed

06/15/2026, 07:30:00 PM UTC

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Organization & Contact Information

AgencyGovernment of Canada → University of Waterloo

Contacts1 person available

OfficeN/A

Organization / Agency

Government of Canada → University of Waterloo

Office AddressN/A

Contacts

Reception ServicesContracting Authority

contact@example.gov

+1 (555) 000-0000

Full Description

The Atomic Layer Etcher, which is the subject of this RFP, is to be utilized for the precise etch of thin layers of dielectrics, metals and superconducting materials as part of the fabrication of quantum devices. This system will form part of the growing toolset managed under the University of Waterloo’s Quantum-Nano Fabrication and Characterization Facility (QNFCF) core scientific platform. The facility enables scientists and engineers to pursue frontier research in materials science, nanotechnology, and quantum information processing. Bidding and Documents are available on http://www.merx.com. Fees may apply; See https://www.merx.com/public/pricing for more information.