Chemical-Mechanical Polishing Tool (CMP)

This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; quotes are being requested from this document and a written solicitation shall NOT be issued. Simplified procurement procedures will be used for this acquisition per Federal Acquisition Regulation (FAR) Part 13. The NAICS is 334413 and the small business size standard is 500 employees. This is issued as a request for quote (RFQ). This solicitation shall be a small business set-aside. This document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular FAC 2005-80 effective (March 2, 2015). Registration with the System for Award Management (SAM) prior to award, pursuant to applicable regulations and guidelines is required. Registration information can be found at www.sam.gov. The National Institute of Standards and Technology (NIST) Acquisition Management Division intends to procure a Chemical-Mechanical Polishing Tool (CMP). Purpose: The Boulder MicroFab is in need of a Chemical-mechanical polishing (CMP) tool to extend its capabilities to allow for reliable submicron Josephson junction fabrication, develop processes with more layers for complex circuits, and for improved values of maximum currents of superconducting wires in microcircuits. The tool needs to accommodate wafer sizes including 3, 4, and 6 inches in diameter; it needs to be compact in size and designed for R&D and process development in contrast to tools designed for production featuring complex mechanisms for automated loading of wafers. Technical Specifications: 1. Platen Section: Stainless Steel or similar material platen capable of receiving a carrier. Platen must rotate at speeds of up to 80 rpm with variable speed control. 2. Carrier Section: Carrier must be able to accept wafers from 76.5 mm (3 inch) to 150 mm (6 inch) with manual loading of wafers and size interchange fast and reliable for everyday users of the tool. There must be an adjustable force control up to 15 Kg force. The spindle containing the carrier must have a variable speed control of up to 80 rpm. 3. Conditioning: Must have the capability of varying the conditioning drive to speeds of up to 60 rpm. 4. Dimensions: Compact dimensions are preferred; table top capability or footprint less than 1.2 m2. 5. Control system: Must allow for control of basic operating parameters including polishing time, rotational speed, and carrier down force. 6. Slurry supply: One slurry pump is sufficient for the main purpose of polishing silicon oxide that will be given to this polisher. The use of a different slurry for research in new processes should be possible after proper rinsing of the pump and polisher. 7. DI water: Consumption must be a maximum of 10 L/min. DELIVERY AND INSTALLATION: The place of delivery and performance is the Process Support room for the Boulder MicroFab, room 81-1C108. NIST personnel will carry out the installation of electrical, water, and pneumatic supplies to the equipment according to its specifications. No equipment needs to be removed prior to this installation. The vendor will supply all the instructions necessary for installation and operation of the equipment and will also give telephone support for the qualification and use of the tool. In accordance with the non-manufacturer rule, the contractor shall be a small business under the applicable size standard and shall provide either its own product or that of another domestic small business manufacturing or processing concern. See FAR 19.102(f) for additional information. BASIS OF AWARD: Award shall be made to the lowest priced, technically acceptable quoter. This will be a firm fixed price purchase order to the responsible contractor submitting a quote that meets all of the requirements of this RFQ and who has the lowest price. TECHNICAL CAPABILITY: Evaluation of Technical Capability will be based on the information provided in the quotation. Documentation submitted in the quotation will be evaluated to determine that the proposed equipment meets the Governments minimum required specifications. PRICE: Price will be evaluated for reasonableness. The following clauses and provisions apply to this synopsis/solicitation. The full text of these provisions and clauses are available at https://acquisition.gov/far/. 52.212-1 Instructions to Offerors-Commercial Items. 52.212-2 Evaluation-Commercial Items (Oct 2014) [Quotes shall be evaluated in accordance with the criteria shown above] 52.212-3 Offeror Representations and Certifications'Commercial Items (Dec 2014) 52.212-4 Contract Terms and Conditions'Commercial Items (May 2014) 52.212-5 Contract Terms and Conditions Required to Implement Statutes or Executive Orders'Commercial Items (Dec 2014). The following clauses in 52.212-5 are hereby incorporated and applicable to any award made as a result of this combined synopsis/solicitation: 52.222-50 Combatting Trafficking in Persons (Feb 2009) 52.233-3 Protest After Award (Aug 1996) 52.233-4 Applicable Law for Breach of Contract Claim (Oct 2004) 52.219-6 Notice of Total Small Business Set-Aside (Nov 2011) 52.219-28 Post-Award Small Business Program Representation (Jul 2013) 52.222-3 Convict Labor (Jun 2003) 52.222-19 Child Labor-Cooperation With Authorities and Remedies (Jan 2014) 52.223-18 Encouraging Contractor Policies to Ban Text Messaging While Driving (Aug 2011) 52.225-1 Buy American - Supplies (May 2014) 52.225-13 Restriction on Certain Foreign Purchases (Jun 2008) 52.232-33 Payment by Electronic Funds Transfer-System for Award Management (Jul 2013) The following provisions/clauses under the Department of Commerce Acquisition Regulations Systems are hereby incorporated and applicable to any award made as a result of this combined synopsis/solicitation: CAR 1352.201-70 Contracting Officer's Authority CAR 1352.209-73 Compliance with the Laws CAR 1352.209-74 Organizational Conflict of Interest CAR 1352.233-70 Agency Protests CAR 1352.233-71 GAO and Court of Federal Claims Protests Questions: NOTICE: Quoters must submit all questions concerning this solicitation in writing to Miguel.Vasquez@nist.gov. Any responses to questions will be made in writing in an amendment to the synopsis/solicitation. The deadline for the submission of questions for this RFQ is March 19, 2015. QUOTATION DUE DATE AND SUBMITTAL INSTRUCTIONS: Interested vendors capable of furnishing the specified equipment in this combined synopsis/solicitation should submit their quote to Miguel Vasquez, Contract Specialist, at miguel.vasquez@nist.gov. Quotations are due no later than 1:00 PM Mountain Time on March 24, 2015. Quotes submitted via FAX ARE NOT AUTHORIZED AND WILL NOT BE ACCEPTED. Quotes shall include complete company name, email, address, telephone. END OF COMBINED SYNOPSIS SOLICITATION.