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High-Resolution Metrology and Verification Lab

Active

SBIR / STTR

Response Deadline10/21/2026, 04:00:00 AM UTC

Contract Overview

Solicitation details, issuing organization, response deadlines, documents, and interested companies for this government contract opportunity.

AI Contract Overview

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This subcontract opportunity, titled High-Resolution Metrology and Verification Lab, supports prime contractors on DARPA SHIELDER projects through the analytical verification of etched structures. The scope of work involves conducting cross-sectional analysis to verify pattern transfer and measuring sidewall and line-edge roughness at the nanometer scale. Using SEM, TEM, and AFM equipment, the contractor will verify etch selectivity and dimensional control, delivering high-resolution metrology data reports and imagery that confirm 100:1 aspect ratios and roughness levels below 2 nm RMS. The project is a total small business set-aside under NAICS code 541380, specifically mandating SBIR/STTR compliance for firms with fewer than 500 employees. Interested parties must possess CMMC Level 1 certification to be eligible. The solicitation was posted on September 2, 2026, with a response deadline of October 21, 2026.

General Info

Small business subcontract for high-resolution metrology and verification on DARPA SHIELDER projects.

Agency

Department of Defense → Defense Advanced Research Projects Agency

NAICS

541380 - Testing Laboratories and Services

Place of Performance

Not specified

Set-Aside

SBA

Documents

This scope was carved out of DPA26TZ06-DV004.

The full solicitation package (2 documents), including the RFP, is on the prime solicitation, not on this scope.

View the prime solicitation

Scalable Hard-mask materials with Improved Etch resistance and Low Degradation for Extreme-aspect-Ratio fabrication (SHIELDER)

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Timeline

PostedSep 2

subcontract

Response DeadlineOct 21

Submission deadline

Response Deadline

10/21/2026, 04:00:00 AM UTCin 10 days

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Organization & Contact Information

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AgencyDepartment of Defense → Defense Advanced Research Projects Agency

ContactsNo contacts available

OfficeN/A

Organization / AgencyDepartment of Defense → Defense Advanced Research Projects Agency

Office AddressN/A

ContactsNo contact information available

Full Description

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Performs analytical verification of etched structures for prime contractors on DARPA SHIELDER projects. Conducts cross-sectional analysis to verify pattern transfer and measures sidewall and line-edge roughness at the nanometer scale. Utilizes SEM, TEM, and AFM equipment to verify etch selectivity and dimensional control. Requires CMMC Level 1. Delivers high-resolution metrology data reports and imagery verifying < 2 nm RMS roughness and 100:1 aspect ratios.

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