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This Sources Sought opportunity from Department Of Energy was posted on August 13, 2025. The submission period has ended. Browse the details below for market research, or find similar active opportunities.

Inductively Coupled Plasma (ICP) Etcher with Atomic Layer Etching (ALE)

Closed
KT-2025-01Federal

Contract Overview

Solicitation details, issuing organization, response deadlines, documents, and interested companies for this government contract opportunity.

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General Info

NAICS

333242 - Semiconductor Machinery Manufacturing

Place of Performance

Berkeley, CA, 94720, USA

Set-Aside

NONE

Documents

1

RFI No. KT-2025-01: ICP Etcher with Atomic Layer Etching (ALE)

PDF, Low priorityrfi
Low

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Timeline

PhaseClosed
Posted

Sources Sought

Response Deadline

Deadline has passed

Submission Closed

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Organization & Contact Information

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AgencyDepartment Of Energy → Berkeley National Labor - DOE Contractor
Contacts1 person available
OfficeBerkeley, CA, 94720, USA
Office AddressBerkeley, CA, 94720, USA

Full Description

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The University of California, Lawrence Berkeley National Laboratory (LBNL) is conducting market research to identify sources that possess the capabilities and experience necessary to provide an Inductively Coupled Plasma (ICP) Etcher with Atomic Layer Etching (ALE). The LBNL Molecular Foundry is a national user facility dedicated to nanoscience research. Its primary focus is to provide researchers from around the world, including those from academia, industry, and other government labs, with free access to state-of-the-art instruments, expertise, and capabilities in this field. A new ICP etcher with ALE capabilities is required to replace LBNL's existing tool, ensuring support for current projects and expanding research into quantum computing, sensing, and nanofabrication.

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DEADLINE

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Solicitation # AA-2027-02
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POSTED

7 days ago

DEADLINE

in 14 days
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