A -- PHOTOMASK INFRASTRUCTURE PROGRAM FOR FUTURE GENERATION MASK INSPECTION TOOLS
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The Air Force Research Laboratory’s Manufacturing Technology Division plans to award a sole source contract or Technology Investment Agreement with a 50/50 cost share to KLA-Tencor Corporation for a photomask infrastructure program aimed at developing future generation mask inspection tools. This procurement, conducted under the authority of Title III of the Defense Production Act, is intended to support a domestically owned manufacturer critical for meeting future defense requirements related to integrated circuits used in classified applications. The task involves a technical analysis and study focused on mask inspection tool technologies for feature sizes of 45nm and below, with an anticipated performance period of 12 months. The selected contractor must demonstrate leadership and technological capabilities in this specialized field, including experience transitioning products from R&D to production, as well as the ability to address challenges associated with advancing mask inspection technologies. Proposals will not be competitively solicited, reflecting the government’s determination that only one responsible source—KLA-Tencor—possesses the unique capability and industrial base to meet the program’s requirements. The acquisition will be conducted under specific federal regulations permitting less than full and open competition due to the offeror’s domestic R&D activity and merchant supplier experience. Interested parties with relevant expertise are invited to submit qualifications within 15 days, detailing their current products, market share, research efforts, budgets, personnel, and timelines for future feature size developments, although submissions beyond the deadline or lacking necessary information will not be considered. The government emphasizes that no other sources can fulfill these requirements, underscoring the strategic importance of maintaining domestic capability for mask inspection technologies critical to national defense.
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