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A -- PHOTOMASK INFRASTRUCTURE PROGRAM FOR FUTURE GENERATION MASK INSPECTION TOOLS

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Reference-Number-TIA-Number-FA8650-06-2-5502Federal

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The Air Force Research Laboratory’s Manufacturing Technology Division plans to award a sole source contract or Technology Investment Agreement with a 50/50 cost share to KLA-Tencor Corporation for a photomask infrastructure program aimed at developing future generation mask inspection tools. This procurement, conducted under the authority of Title III of the Defense Production Act, is intended to support a domestically owned manufacturer critical for meeting future defense requirements related to integrated circuits used in classified applications. The task involves a technical analysis and study focused on mask inspection tool technologies for feature sizes of 45nm and below, with an anticipated performance period of 12 months. The selected contractor must demonstrate leadership and technological capabilities in this specialized field, including experience transitioning products from R&D to production, as well as the ability to address challenges associated with advancing mask inspection technologies. Proposals will not be competitively solicited, reflecting the government’s determination that only one responsible source—KLA-Tencor—possesses the unique capability and industrial base to meet the program’s requirements. The acquisition will be conducted under specific federal regulations permitting less than full and open competition due to the offeror’s domestic R&D activity and merchant supplier experience. Interested parties with relevant expertise are invited to submit qualifications within 15 days, detailing their current products, market share, research efforts, budgets, personnel, and timelines for future feature size developments, although submissions beyond the deadline or lacking necessary information will not be considered. The government emphasizes that no other sources can fulfill these requirements, underscoring the strategic importance of maintaining domestic capability for mask inspection technologies critical to national defense.

General Info

Sole source contract awarded to KLA-Tencor for advanced mask inspection tool development.

NAICS

541715 - Research and Development in the Physical, Engineering, and Life Sciences (except Nanotechnology and Biotechnology)

Place of Performance

OH

Set-Aside

NONE

Documents

0

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Timeline

PhasePresolicitation
Posted

Presolicitation

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Organization & Contact Information

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AgencyDepartment Of Defense → FA8650 USAF Afmc Afrl Pzl Afrl/pzl
Contacts2 people available
OfficeWRIGHT PATTERSON AFB, OH, 45433-7541, USA
Office AddressWRIGHT PATTERSON AFB, OH, 45433-7541, USA
Contacts
Nick BraunContract Negotiator
Anita M BaileyContracting Officer/Branch Chief

Full Description

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NOTICE OF INTENT TO AWARD A SOLE SOURCE PROCUREMENT FOR PHOTOMASK INFRASTRUCTURE PROGRAM FOR FUTURE GENERATION MASK INSPECTION TOOLS. This is a pre-solicitation synopsis which is not a request for competitive proposals. The work will identify, analyze and evaluate enabling technologies for future generations of mask inspection tools. The Air Force Research Laboratory, Manufacturing Technology Division (AFRL/MLM) intends to award a contract (with 50/50 cost share) or a Technology Investment Agreement (with 50/50 cost share) as appropriate, on the basis of less than full and open competition for this requirement to KLA-Tencor Corp., 160 Rio Robles, San Jose, CA 95134. Under the authority of Title III of the Defense Production Act (DPA) (50 U.S.C. App. Section 2061 et seq.), the Title III Program Office is contemplating this procurement to maintain a U.S. owned, domestic, merchant photomask inspection tool manufacturer in order to meet the future defense requirements for critical integrated circuits (classified applications). Note: If subsequent phases are awarded, the offeror must be able to satisfy the requirements of classified programs. The period of performance for the procurement is anticipated to be 12 months. A description of the task is as follows: Mask Inspection Tool Technical Analysis and Study for feature size 45nm and below. The ability of the offeror to conduct this technical analysis and study and accomplish the goals of this program will be assessed based on the offeror's demonstrated leadership in the industry and the offeror's capability to effectively address challenges facing future generations of mask inspection tools. These challenges include the identification, analysis, evaluation and demonstration of the enabling technologies required for future generations of mask inspection tools. The government intends to issue an award for these requirements on a Sole Source basis per FAR 6.302-1(a)(1), - Only One Responsible Source or - DoD Grant and Agreement Regulations 37.400 (b), based on their domestic R&D activity and on their experience as a merchant industrial supplier providing leading edge technology, as well as an assessment of the program risk to the Government. Offerors who are capable of providing the services stated above shall fully identify their interest and submit, in writing, information documenting their qualifications and capabilities to meet the requirements stated above within 15 days after publication of this synopsis. This documentation shall specify the offeror's area of expertise and experience. It shall include the photomask feature size currently supported as an industrial supplier. The documentation shall include a listing of products and services currently offered as a merchant industrial supplier along with market share in each area. The documentation shall identify relevant past, present and future research along with information on research budgets, personnel, and facilities. The information should identify the feature size currently under R&D and the time table for migrating to successive smaller feature sizes. The offeror shall document their experience in transitioning the product from R&D to production. Responses received after 15 days or without the required information will be considered non-responsive to the synopsis, and will not be considered. Direct all technical questions pertaining to this acquisition to Capt Mitchell Fait, Project Engineer, at Mitchell.Fait@wpafb.af.mil. Note: In addition, direct all questions pertaining to this acquisition to the contracting point of contacts listed above in this announcement. Only one responsible source per capability of interest and no other supplies or services will satisfy agency requirements as per the authority under 10 U.S.C. 2304(c)(1). All responsible sources may submit information, which shall be considered by the agency. See Numbered Note 22.

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