Pre-sharp fabrication

Atom Probe Tomography (APT) is a powerful tool for the semiconductor industry, offering the unique ability to identify and map the chemical identity and location of individual atoms with spatial resolution at or below the smallest critical dimensions found in modern devices. These capabilities have led most major semiconductor manufacturers to install APT systems at their manufacturing facilities and/or R&D labs. Significant advances in the technique have been made in recent years, however, industry adoption as a true metrology tool is still held back by measurement inaccuracies that may be overcome by using standards. This project will produce a series of industrially relevant reference materials, data sets, and standard practices that will improve the accuracy and repeatability of quantitative measurements made by APT. These standards will also serve as critical benchmarking standards going forward, allowing semiconductor manufacture