Laser Induced Breakdown Spectroscopy (LIBS) and Laser Ablation Inductively Coupled Plasma Mass Spectrometry (LA-ICP-MS) tandem instrument

The Department of Commerce is seeking to develop high-purity solid Standard Reference Materials, Reference Materials, and Research Grade Test Materials to address current shortages in chips manufacturing. This initiative aims to enhance process control and enable more efficient, comparable characterizations of source materials. To support these objectives, the project will focus on advancing NIST capabilities in laser-based analytical methods and glow discharge mass spectrometry, while simultaneously reducing detection limits for existing nuclear techniques. The scope of work includes the implementation of a tandem instrument utilizing Laser Induced Breakdown Spectroscopy and Laser Ablation Inductively Coupled Plasma Mass Spectrometry. Based in Gaithersburg, the project emphasizes technology transfer to help U.S. industry partners establish internal measurement capabilities. NIST will further support the industry by providing access to these new measurement facilities through collaborative agreements.