APXPS spectrometer with differential pumping system and detector
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The Department of Commerce is seeking an APXPS spectrometer equipped with a differential pumping system and detector to support the development of a new plasma-XPS metrology platform. This initiative leverages expertise in plasma-surface interaction and operando photoelectron spectromicroscopy to enable quantitative, sub-monolayer sensitive chemical analysis of wafer surfaces, thin films, and interfaces during real-time plasma processing. The project aims to enhance semiconductor process development and inspection toolsets for next-node technology through collaborations with industrial partners and academia. The procurement is listed as a forecast with the place of performance located in Gaithersburg. It falls under NAICS code 334413 and is managed by the Department of Commerce, with coordination provided by the CHIPS office. This effort represents a significant advancement in measurement science intended to improve the monitoring and control of chemical statuses during critical semiconductor manufacturing steps.
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GAITHERSBURG, MD, USASet-Aside
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