CHIPS R&D: Atom Probe Tomography Chamber GCPN 2.04

The Department of Commerce is forecasting the procurement of an Atom Probe Tomography Chamber to support the National Institute of Standards and Technology in alignment with the CHIPS for America Act. Based in Boulder, this initiative aims to advance measurement science for the domestic semiconductor industry by enabling the Material Measurement Laboratory to characterize materials and establish correlations between processing, nanostructure, and properties. The primary objectives of this acquisition include studying the impact of laser wavelength on semiconductor materials to quantify measurement bias and uncertainty. By reducing these uncertainties, the project seeks to enhance the accuracy, repeatability, and reproducibility of atom probe tomography measurements while developing new science through the three-dimensional atomic imaging of nanoscale samples.