Xray Hardware Pkg

The Xray Hardware Pkg forecast, issued by the Department of Commerce, focuses on addressing critical measurement gaps in the semiconductor industry to enable smaller features and increased yield. The project aims to investigate how extreme ultraviolet lithography and new photoresist chemistries affect chemical heterogeneities and patterning quality at nanoscale dimensions. By studying the underlying mechanisms of EUV exposure and its spatial extent, the NIST team intends to better understand the relationship between resist chemistry and structural integrity. To achieve these goals, the initiative will involve the development of a specialized suite of metrology techniques designed to characterize advanced lithographic materials and measure chemical distributions in situ. The work will be performed in Gaithersburg under NAICS code 334413. Interested parties can coordinate with the designated point of contact, Nathali Medina, or the DOC OSDBU for further information regarding this technical effort.