Single Particle Spectroscopoy Microscope

The Department of Commerce is forecasting a project titled Single Particle Spectroscopy Microscope to develop advanced measurement technology, reference data, and materials for trace impurity gas analysis. The primary objective is to achieve unprecedented precision, enabling next-generation diagnostics to identify impurities in process gases at sub-parts-per-billion levels. This initiative aims to support the development of industry-ready reference materials and point-of-use diagnostics, which are essential for breakthroughs in critical tooling such as extreme ultra-violet lithography. The project will establish a comprehensive framework for impurity fingerprinting with traceability to new gas primary standards and documentary standards to enhance overall quality systems. Performance for this effort is expected to take place in Gaithersburg, and the project falls under NAICS code 334413. Interested parties can coordinate through the Department of Commerce points of contact, including Nathali Medina and the DOC OSDBU.